Advanced Machining and Micromachining Processes E-Book
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- Herausgeber: John Wiley & Sons
- Kategorie: Wissenschaft und neue Technologien
- Serie: Advances in Production Engineering
- Sprache: Englisch
This book offers a comprehensive overview of the fundamentals, principles, and latest innovations in advanced machine and micromachining processes.
Businesses are continually seeking innovative advanced machining and micromachining techniques that optimize efficiency while reducing environmental harm. This growing competitive pressure has spurred the development of sophisticated design and production concepts. Modern machining and micromachining methods have evolved to accommodate the use of newer materials across diverse applications, while ensuring precise machining accuracy.
The primary aim of this book is to explore and analyze various approaches in modern machining and micromachining processes, with a focus on their effectiveness and application in successful product development. Consequently, the book emphasizes an industrial engineering perspective.
This book covers a range of advanced machining and micromachining processes that can be utilized by the manufacturing industry to enhance productivity and contribute to socioeconomic development. Additionally, it highlights ongoing research projects in the field and provides insights into the latest advancements in advanced machining and micromachining techniques.
The 31 chapters in the book cover the following subjects: abrasive jet machining; water jet machining; principles of electro discharge machining; wire-electro discharge machining; laser beam machining; plasma arc machining; ion beam machining; electrochemical machining; ultrasonic machining; electron beam machining; electrochemical grinding; photochemical machining process; abrasive-assisted micromachining; abrasive water jet micromachining; electro discharge machining; electrochemical micromachining; ultrasonic micromachining; laser surface modification techniques; ion beam processes; glass workpiece micromachining using electrochemical discharge machining; abrasive water jet machining; ultrasonic vibration-assisted micromachining; laser micromachining’s role in improving tool wear resistance; stress; and surface roughness in high-strength alloys; abrasive flow finishing process; elastic emission machining; magnetic abrasive finishing process; genetic algorithm for multi-objective optimization in machining; machining of Titanium Grade-2 and P-20 tool steel; and wet bulk micromachining in MEMS fabrication.
Audience
The book is intended for a wide audience including mechanical, manufacturing, biomedical, and industrial engineers and R&D researchers involved in advanced machining and micromachining technology.
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Veröffentlichungsjahr: 2025
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Table of Contents
Cover
Table of Contents
Series Page
Title Page
Copyright Page
Preface
1 Overview of Advanced Machining and Micromachining Processes
1.1 Introduction
1.2 Electrical Machining
1.3 Thermal Machining
1.4 Chemical Machining
1.5 Mechanical Micromachining
1.6 Electrical Micromachining
1.7 Thermal Micromachining
1.8 Chemical Micromachining
1.9 Ultrasonic Micromachining
1.10 Other Micromachining Processes
1.11 Future Directions and Emerging Technologies
1.12 Conclusion
References
2 Abrasive Jet Machining
2.1 Introduction
2.2 Description of Process
2.3 Equipment Description
2.4 Process Parameters
2.5 Process Capabilities
2.6 Application of Abrasive Jet Machining
2.7 Benefits of Abrasive Jet Machining (AJM)
2.8 Drawbacks of Abrasive Jet Machining
2.9 Characteristics of AJM
2.10 Mechanics of Cutting in AJM
References
3 Water Jet Machining
3.1 Introduction
3.2 Description of Process
3.3 Description of Equipment
3.4 Process Parameters
3.5 Process Capability
3.6 Applications of WJM
3.7 Advantages of WJM
3.8 Disadvantages of WJM
3.9 Worked Examples
References
4 Electric Discharge Machining
4.1 Introduction
4.2 Description of Process
4.3 Basic Requirement of EDM Process
4.4 Description of Equipment
4.5 Types of Generators
4.6 Electrode Material
4.7 Choice of Dielectric Fluid
4.8 EDM Tool Design
4.9 Process Parameters
4.10 Machining Characteristics
4.11 Process Capabilities of EDM
4.12 Characteristics of Spark-Eroded Surfaces
4.13 Applications of EDM
4.14 Advantages of EDM
4.15 Disadvantages of EDM
4.16 Factors to be Considered in EDM Machine Tool Selection
References
5 Wire-Electric Discharge Machining
5.1 Introduction
5.2 Description of Process
5.3 Equipment
5.4 Process Parameters of Wire EDM
5.5 Process Capability of Wire EDM
5.6 Difference Between Wire EDM and EDM
5.7 Applications of Wire EDM
5.8 Advantages of Wire EDM
5.9 Disadvantages of Wire EDM
5.10 Process Parameters in Wire EDM
5.11 Worked Examples
References
6 Laser Beam Machining
6.1 Introduction
6.2 Lasing Action and Population Inversion
6.3 Methods to Achieve Population Inversion
6.4 Types of Lasers
6.5 Description of Process
6.6 Beam Parameters
6.7 Process Capability
6.8 Applications of LBM
6.9 Advantages of LBM
6.10 Disadvantages of LBM
6.11 Comparison Between EBM and LBM
References
7 Plasma Arc Machining
7.1 Introduction
7.2 Plasma Generation
7.3 Description of Process
7.4 Description of Equipment
7.5 Modes of Operation of DC Plasma Torches
7.6 Methods to Make Arcs More Stable
7.7 Parameters that Influence PAM Performance
7.8 Capability to Process
7.9 Applications of Plasma Arc Machining
7.10 Advantages of PAM
7.11 Disadvantages of PAM
7.12 Safety Precautions to be Taken in PAM
References
8 Ion Beam Machining
8.1 Introduction
8.2 Description of Process
8.3 Description of Equipment
8.4 Process Characteristics
8.5 Applications of IBM
8.6 Advantages of IBM
8.7 Disadvantages of IBM
References
9 Electrochemical Machining
9.1 Introduction
9.2 Electrochemical Machining Techniques
9.3 Process Parameters and Control
9.4 Material Specifications in ECM
9.5 Advancements in ECM Technology
9.6 Conclusion
References
10 Ultrasonic Machining
10.1 Introduction
10.2 Process Description
10.3 Description of Equipment
10.4 Tool Feed Mechanism
10.5 Abrasive Slurry
10.6 Liquid Media
10.7 Process Parameters
10.8 Process Capability
10.9 Applications
10.10 Advantages of USM
10.11 Disadvantages of USM
10.12 Mechanism of Material Removal in Ultrasonic Machining Operation
10.13 Recent Developments in USM
References
11 Electron Beam Machining
11.1 Introduction
11.2 Theory of EBM
11.3 Equipment
11.4 Mathematics of Electron Beam Machining
11.5 Mechanics of EBM
11.6 Process Parameter of Electron Beam Machining
11.7 Application of EBM
11.8 Advantages of EBM
11.9 Disadvantages of EBM
11.10 Worked Out Examples
References
12 Chemical Machining
12.1 Introduction
12.2 General Description of Chemical Machining Process
12.3 Five Steps of Chemical Machining
12.4 Elements of Process
12.5 Influence of Etchant Medium
12.6 Chemical Blanking
12.7 Accuracy of Chemical Blanking
12.8 Applications of Chemical Machining
12.9 Advantages of CHM
12.10 Disadvantages of CHM
12.11 Selection of Maskant
12.12 Selection of Etchants
12.13 Chemical Milling
12.14 Chemical Engraving
12.15 Photochemical Blanking
12.16 Worked Examples
References
13 Electrogrinding
13.1 Introduction
13.2 Electrochemical Grinding Operational Parameters
13.3 Process and Working Principles of Electrochemical Grinding
13.4 Components of Electrochemical Grinding Machines
13.5 Grinding Methods of ECG
13.6 Variations of Electrochemical Grinding in Research Stage
13.7 Industrial Applications of ECG
13.8 Advantages and Challenges of Electrochemical Grinding
13.9 Grinding Processes
13.10 Summary and Recommendation
References
14 Photochemical Machining
14.1 Introduction
14.2 Contextual
14.3 PCM Process
14.4 Mechanism of Etching
14.5 Steps for Experimental Designing
14.6 Process Parameters
14.7 Parametric Effect
14.8 Analysis of Machined Surfaces
14.9 Conclusion
14.10 Scope for Future Work
References
15 Abrasive-Assisted Micromachining
15.1 Introduction
15.2 Erosion Mechanism
15.3 Erosion Mechanisms in AAM Explanation
15.4 Existing Erosion Models
15.5 Development of AAM Erosion Models
15.6 Verification and Validation of AAM Erosion Models
15.7 Applications of Erosion Models
15.8 Advancements in Erosion Modeling Techniques
15.9 Concluding Remarks and Implications for AAM Erosion Modeling
References
16 Abrasive Water Jet Micromachining: Pushing the Micro-Frontier Further—A Glimpse at Recent Advancements
16.1 Introduction
16.2 The Essence of AWJMM: A Powerful Blend of Water and Grit
16.3 Some Prominent Research Works on Abrasive Water Jet Micromachining
16.4 Conclusion
16.5 A Glimpse Into the Future: What Lies Ahead for AWJMM?
References
17 Micro-Electrical Discharge Machining: State of Art
17.1 Introduction
17.2 Principles of Micro-EDM
17.3 Major Components of Micro-Electrical Discharge Machining
17.4 Process and Machining Parameters of Micro-Electrical Discharge Machining
17.5 Major Varieties of Electrical Discharge Micromachining
17.6 Hybrid Type of Electrical Discharge Micromachining
17.7 Summary
References
18 Electrochemical Micromachining
18.1 Introduction
18.2 Overview of Electrochemical Micromachining
18.3 Electrochemistry of Electrochemical Micromachining
18.4 Machining Conditions in Electrochemical Micromachining
18.5 Electrochemical Micromachining Set Up
18.6 Fabrication of Different Microtools in Electrochemical Micromachining
18.7 Process of Measurement of Microfeatures
18.8 Application of Electrochemical Micromachining
18.9 Conclusions
18.10 Future Research Opportunities
References
19 Ultrasonic Micromachining
19.1 Introduction
19.2 Principles of Ultrasonic Micromachining
19.3 Equipment for Ultrasonic Micromachining
19.4 Process Parameters in Ultrasonic Micromachining
19.5 Applications of Ultrasonic Micromachining
19.6 Advantages and Limitations of Ultrasonic Micromachining
19.7 Recent Advancements and Emerging Trends
19.8 Conclusions
Acknowledgment
References
20 Laser Surface Modification of Implant Materials: An Insight
20.1 Introduction
20.2 Fundamentals of Laser Surface Modification
20.3 Laser Surface Modification Techniques
20.4 Applications of Laser Surface Modification in Implant Materials
20.5 Characterization of Laser-Modified Surfaces
20.6 Challenges and Future Perspectives
20.7 Conclusion
References
21 Ion Beam Processing: A Brief Review
21.1 Introduction
21.2 Focused Ion Beam Process
21.3 Ion Beam Process
21.4 Developed Ion Beam Process
21.5 Combined Ion Beam Process
21.6 Conclusion
References
22 Parametric Optimization in Electrochemical Discharge Machining of Microchannel on Glass Using Multiple Tool Passes
22.1 Introduction
22.2 Methodology Adopted to Machine Microchannel
22.3 Experimentation
22.4 Multi-Response Optimization
22.5 Conclusions
References
23 Abrasive Water Jet Machining
23.1 Introduction
23.2 Elements of Abrasive Water Jet Machining
23.3 Process Variables and Operating Factors in AWJM
23.4 Abrasive Water Jet Machining Applications
23.5 Advantages of Abrasive Water Jet Machining
23.6 Challenges and Limitations
23.7 Recent Trends and Developments in AWJM
23.8 Conclusion
References
24 Effect of Ultrasonic Vibration-Assisted Micromachining on the Surface Properties of Difficult-to-Machine Materials
Nomenclature
24.1 Introduction
24.2 The Technique of UVAMM
24.3 UVAMM of Difficult-To-Machine Materials
24.4 Conclusion
References
25 A Significant Impact of Laser-Assisted Micromachining on Tribological Properties of High Strength Alloys
25.1 Introduction
25.2 Road Map of Laser-Assisted Micromachining
25.3 Micromachining
25.4 Lasers in Micromachining
25.5 Methodology of Laser-Assisted Micromachining
25.6 Laser-Assisted Micromachining
25.7 Conclusion
Summary
Scope for Future Work
References
26 Abrasive Flow Finishing
26.1 Introduction
26.2 Significant Process Parameters
26.3 Classification of AFF Method
26.4 Equipment
26.5 Process
26.6 Application of Special Techniques
26.7 Hybrid AFF Processes
26.8 Monitoring of AFF Process
26.9 Advantages and Limitations of AFF
26.10 Applications of AFF
26.11 Summary
26.12 Conclusion
References
27 Elastic Emission Machining
27.1 Introduction
27.2 Principle of EEM
27.3 Numerically Controlled Elastic Emission Machining
27.4 Conclusion
References
28 Magnetic Abrasive Finishing Process
28.1 Introduction
28.2 Primary Components of MAF
28.3 MAF Principles
28.4 Working Principle of MAF
28.5 Process Parameters in MAF
28.6 Magnetic Abrasive Preparation
28.7 MAF Tools
28.8 Types of Magnetic Abrasive Finishing Process
28.9 Advantages of Magnetic Abrasive Finishing
28.10 Disadvantages of Magnetic Abrasive Finishing
28.11 Applications of Magnetic Abrasive Finishing
28.12 Surface Finish Improvement in MAF
28.13 Challenges and Future Directions
28.14 Conclusions
References
29 Experimental Analysis of EDM Process While Machining Ti-VT20 Alloy
29.1 Introduction
29.2 Experimental Investigation
29.3 Experimental Result Analysis
29.4 Results and Discussion
29.5 Conclusion
References
30 Estimation of Machining Performance and Machining Characteristics Using Artificial Neural Network in Wire Electric Discharge Machine for Titanium & P-20 Materials
30.1 Introduction
30.2 Experimental Setup
30.3 Artificial Neural Network (ANN)
30.4 Results and Discussion
30.5 Conclusion
References
31 Chemical-Based Bulk Machining and Fabrication of Silicon Microstructures: An Overview
31.1 Silicon: Material for Integrated Circuits and MEMS
31.2 Overview of Microelectromechanical Systems
31.3 Silicon Wafers Fabrication: Procedural Stages
31.4 Silicon Microfabrication Processes
31.5 State-of-Art Application Areas and Present/Futuristic Trends
References
Index
End User License Agreement
List of Tables
Chapter 1
Table 1.1 Summarizes the mechanical micromachining operations and its applicat...
Chapter 4
Table 4.1 Comparison of dielectric fluid for brass electrode/tool steel workpi...
Table 4.2 Commercially available dielectric grade oil.
Table 4.3 Operating parameters.
Table 4.4 Size of microcracks.
Chapter 5
Table 5.1 Effect of low and high conductivity of dielectric.
Table 5.2 Wire tensions in wire EDM.
Table 5.3 Guidelines for choosing parameters for different work materials.
Table 5.4 Difference between wire EDM and EDM.
Chapter 6
Table 6.1 Details of the process of gas lasing elements.
Table 6.2 Beam parameters of commonly used lasers.
Table 6.3 Process capabilities of laser.
Table 6.4 Difference between conduction laser and penetration laser welding.
Table 6.5 Differences between EBM and LBM.
Chapter 7
Table 7.1 Comparison between non transferred arc mode and transferred arc mode...
Table 7.2 Cutting speeds of plasma arc.
Chapter 8
Table 8.1 MRR for different materials.
Chapter 11
Table 11.1 Process parameters of EBM.
Chapter 12
Table 12.1 Surface finish for different materials.
Chapter 13
Table 13.1 ECG, ECM, and EDM process comparison.
Table 13.2 Electrolytes and the corresponding materials they grind in ECG.
Table 13.3 Advantages and challenges of electrochemical grinding.
Table 13.4 Comparison of ECG with other grinding processes.
Chapter 16
Table 16.1 Uses of abrasive water jet micromachining (AWJMM) across different ...
Table 16.2 Overview of how AWJMM is applied in various industries.
Table 16.3 Research findings on abrasive water jet micromachining from selecte...
Table 16.4 Research findings on abrasive water jet micromachining from selecte...
Table 16.5 Research findings on abrasive water jet micromachining from selecte...
Table 16.6 Research findings on abrasive water jet micromachining from selecte...
Chapter 17
Table 17.1 Differentiate between macro-EDM and micro-EDM [9, 10].
Table 17.2 Variant types of electrical discharge micromachining.
Chapter 22
Table 22.1 Properties of borosilicate glass.
Table 22.2 Process parameters at three levels.
Table 22.3 Experimental plan.
Table 22.4 Experimental results.
Table 22.5 S/N ratio for the responses.
Table 22.6 Normalized values of S/N ratios.
Table 22.7 Deviation sequence, GRC, and GRG.
Table 22.8 MRPI on GRG values.
Chapter 23
Table 23.1 The process parameters of AWJM process [17].
Table 23.2 Applications of AWJM [6].
Chapter 24
Table 24.1 Characteristics of vibration-assisted micromachining.
Chapter 25
Table 25.1 Overview of laser-assisted micromachining in tribological propertie...
Chapter 29
Table 29.1 Control parameters and their levels.
Table 29.2 Control parameters and their levels.
Table 29.3 Grey relation co-efficient and grades.
Table 29.4 Validation results for improvement of grey grade.
Chapter 30
Table 30.1 The levels of different control factors.
Table 30.2 Chemical composition of titanium grade-2 material.
Table 30.3 Chemical composition of P-20 tool steel material.
Table 30.4 Standard L’16 OA.
Table 30.5 L
16
OA assigned with factors.
Table 30.6 Measured metrics for titanium material: F-value and R-square values...
Table 30.7 Measured metrics for P-20 tool steel material: F-value and R-square...
Chapter 31
Table 31.1 Standard silicon wafer size versus thickness.
List of Illustrations
Chapter 2
Figure 2.1 Abrasive jet machining.
Figure 2.2 Illustration of abrasive jet machining (AJM).
Figure 2.3 Impact of abrasive particle density and exit gas velocity.
Figure 2.4 Effect of abrasive flow on MRR.
Figure 2.5 Relationship between gas flow rate and abrasive mass flow rate is i...
Figure 2.6 Geometry of single abrasive grit.
Chapter 3
Figure 3.1 Water jet machining process.
Figure 3.2 Mechanism of water jet shearing.
Chapter 4
Figure 4.1 EDM process.
Figure 4.2 Rotary impulse generator.
Figure 4.3 Effect of increasing current on MRR.
Figure 4.4 Effect of increasing sparking frequency.
Figure 4.5 Relationship between current on time and material removal crater si...
Chapter 5
Figure 5.1 Wire EDM setup.
Figure 5.2 Conductivities of water.
Figure 5.3 (a) Effect of frequency on surface finish. (b) Effect of overcut wi...
Figure 5.4 Effect of frequency on surface finish.
Chapter 6
Figure 6.1 Allowed energy levels.
Figure 6.2 Absorption processes in laser.
Figure 6.3 Simulated absorption in laser.
Figure 6.4 Spontaneous emission in laser.
Figure 6.5 Stimulated emission in laser.
Figure 6.6 Optical pumping methods.
Figure 6.7 Laser operation.
Figure 6.8 Solid-state laser.
Figure 6.9 CO
2
laser setup.
Chapter 7
Figure 7.1 Plasma arc machining.
Chapter 8
Figure 8.1 Low and high energy ion implantation.
Figure 8.2 Ion machining process.
Figure 8.3 Ion etching versus chemical etch.
Chapter 9
Figure 9.1 Schematic representation of the electrochemical micromachining (ECM...
Figure 9.2 Principle scheme of plasma electrolytic polishing.
Figure 9.3 Variants of electrochemical machining: (a) sinking, (b) machining w...
Figure 9.4 Schematic diagram of ECM on 304 stainless steel.
Figure 9.5 Schematic diagram of nano-electrochemical machining system.
Chapter 10
Figure 10.1 Basic principles of ultrasonic machining.
Figure 10.2 USM equipment.
Figure 10.3 Concentrator used in USM.
Figure 10.4 Geometry of the abrasive grit and dent amount.
Figure 10.5 Time period during USM.
Figure 10.6 Tool positions at various levels during machining.
Chapter 11
Figure 11.1 Electron beam machining unit.
Figure 11.2 Steps of metal removal in EBM.
Chapter 12
Figure 12.1 Chemical machining process.
Figure 12.2 (a) Flow chart for preparation of workpiece in chemical blanking....
Figure 12.2 (b) Flow chart for preparation of masters in chemical blanking.
Figure 12.2 (c) Flow chart for masking and etching in chemical blanking.
Figure 12.3 (a) Flow chart for precleaning in chemical milling.
Figure 12.3 (b) Flow chart for masking in chemical milling.
Figure 12.3 (c) Flow chart for etching in chemical milling.
Figure 12.3 (d) Flow chart for demasking in chemical milling.
Figure 12.4 Chemical milling of machined surface.
Figure 12.5 Chemical milling of aluminum.
Chapter 13
Figure 13.1 Schematic view of the working principle of ECG.
Figure 13.2 Electrochemical grinding machining (ECG) design components. Adapte...
Figure 13.3 Schematic view of wire electrochemical grinding. Reproduced with p...
Figure 13.4 Inner-jet electrochemical grinding. Reproduced with permission fro...
Figure 13.5 Ultrasonic-assisted electrochemical-drill grinding experimental co...
Figure 13.6 Image of electrochemical mill-grinding. Reproduced with permission...
Figure 13.7 Schematic principle of ICPECG. Reproduced with permission from Hel...
Chapter 14
Figure 14.1 Various steps in PCM process.
Chapter 15
Figure 15.1 The application of CMCs: (a) high-temperature parts of aero-engine...
Figure 15.2 Schematic diagram represents ultrasonic lapping device [62].
Figure 15.3 Basic tool path in the X-Y plane for cylindrical holes. The “forwa...
Figure 15.4 Schematic of the LN
2
pressurizing and dispensing equipment [77].
Chapter 17
Figure 17.1 Working principle of micro-EDM. (a) EDM gap dynamics, (b) EDM disc...
Figure 17.2 Basic components of electrical discharge micromachining [11].
Figure 17.3 Fundamental circuit configurations for (a) transistor type and (b)...
Figure 17.4 Servo feed control system overview [12].
Figure 17.5 µ-WEDM setup and experimental methodology [18].
Figure 17.6 Microscale gear fabricated using micro-EDM: (a) displays SEM image...
Figure 17.7 Various micro-EDM machining approaches: (a) wire electrical discha...
Figure 17.8 Illustration of the simultaneous micro-EDM and micro-ECM (SEDCM) p...
Figure 17.9 (a) Diagram of the hybrid micro-EDM setup with carbon nanofibers a...
Chapter 18
Figure 18.1 Schematic diagram of electrochemical machining.
Figure 18.2 Initial positions of tool and workpiece in ECM.
Figure 18.3 Final shape evolution in ECM of workpiece.
Figure 18.4 Electrical double layer.
Figure 18.5 Electrical circuit model of EMM cell.
Figure 18.6 Comparison of theoretical and experimental MRR.
Figure 18.7 Pulse wave form during EMM.
Figure 18.8 Generation of profile shape.
Figure 18.9 Shape evolution flow chart.
Figure 18.10 Shaping in EMM through mask attached to anode.
Figure 18.11 Shaping in EMM through mask attached to cathode.
Figure 18.12 Methods of microchannel generation.
Figure 18.13 Distribution of equipotential lines for conical microtool.
Figure 18.14 Schematic electrochemical micromachining set up.
Figure 18.15 Pulse shape during short circuit.
Figure 18.16 Schematic diagram for fabricating microtool.
Figure 18.17 Voltage and amplitude combinations for tool fabrication.
Figure 18.18 (a) 6.5° conical microtool. (b) Slightly reversed taper 78 µm at ...
Figure 18.19 Fabrication of disk microtool.
Figure 18.20 SEM micrograph of micro nozzle.
Figure 18.21 (a) 3D surface of channel. (b) Cross-sectional profile. (c) Rough...
Chapter 19
Figure 19.1 Schematic diagram of micro-USM setup.
Figure 19.2 Process parameters in micro-USM.
Chapter 22
Figure 22.1 Overview of the methodology adopted to optimize process parameters...
Figure 22.2 In-house ECDM experimental set-up.
Figure 22.3 Electrolyte (processing) cell arrangement.
Figure 22.4 SEM image of microchannel.
Figure 22.5 Main effects plot for means on GRA.
Chapter 23
Figure 23.1 Elements of abrasive water jet machining.
Figure 23.2 Abrasive particles (a) garnet [6], (b) silicon carbide [6], and (c...
Figure 23.3 The abrasive focusing tube and its parts [13].
Figure 23.4 Experimental set up of AWJM [16].
Figure 23.5 Abrasive blending and distribution system.
Figure 23.6 Process variables and operating factors in abrasive water jet mach...
Figure 23.7 The process variable of AWJM [17].
Figure 23.8 Machining of composite materials [21].
Figure 23.9 Multi-axis AWJM process [16].
Chapter 24
Figure 24.1 Evolution of UVAMM.
Figure 24.2 Classification VAM.
Figure 24.3 Methodology of UVAMM.
Figure 24.4 Comparison of surface roughness of conventional vs UVAMM [16, 17]....
Chapter 25
Figure 25.1 Road map of LAMM.
Figure 25.2 Classification based on geometry size.
Figure 25.3 Types of mechanical micromachining.
Figure 25.4 Lasers in machining.
Figure 25.5 Process flow of laser-assisted micromachining.
Figure 25.6 Laser-assisted micromilling [33].
Figure 25.7 Surface roughness and cutting force in LAMM [35, 40].
Figure 25.8 Laser-assisted microgrinding.
Figure 25.9 Laser-assisted microturning [46].
Chapter 26
Figure 26.1 Unidirectional AFF process.
Figure 26.2 Two-way AFF process.
Figure 26.3 Orbital AFF method.
Figure 26.4 Techniques applied for study of AFF method.
Figure 26.5 Hybrid finishing methods involving the AFF method.
Chapter 27
Figure 27.1 Schematic view for transporting and accelerating powder particles ...
Chapter 29
Figure 29.1 Schematic diagram of the electric discharge machining process.
Figure 29.2 (a) EDM machining setup. (b) Workpiece material after machining. (...
Figure 29.3 Simulink diagram.
Figure 29.4 Training performance progress for MRR.
Figure 29.5 Performance plot for MRR.
Figure 29.6 Regression plot of MRR.
Figure 29.7 Training performance progress for TWR.
Figure 29.8 Performance plot for TWR.
Figure 29.9 Regression plot of TWR.
Figure 29.10 Training performance progress for Ra.
Figure 29.11 Performance plot for Ra.
Figure 29.12 Regression plot of Ra.
Figure 29.13 Training performance progress for OC.
Figure 29.14 Performance plot for OC.
Figure 29.15 Regression plot of OC.
Figure 29.16 Plot functions for GA.
Chapter 30
Figure 30.1 Experimental set-up during machining.
Figure 30.2 AE sensor.
Figure 30.3 A sample ANN.
Figure 30.4 Variation of SR and AE
RMS
with machining time for Pon (16 µs), Pof...
Figure 30.5 (a): Response plot on SR for titanium grade-2 material. (b): Respo...
Figure 30.6 (a): Ra v/s machining time for titanium material. (b): Ra v/s mach...
Figure 30.7 (a): AE
SS
v/s machining time for titanium material. (b): AE
SS
v/s ...
Figure 30.8 (a): AE
RMS
v/s machining time for titanium material. (b): AE
RMS
v/...
Figure 30.9 (a): EW v/s machining time for titanium material. (b): EW v/s mach...
Figure 30.10 (a): AE
SS
v/s machining time for titanium material. (b): AE
SS
v/s...
Figure 30.11 (a): AE
RMS
v/s machining time for titanium material. (b): AE
RMS
v...
Figure 30.12 Study of percentage for titanium material.
Figure 30.13 The performance plot for titanium in ANN.
Figure 30.14 Measured and predicted by ANN for SR of titanium material.
Figure 30.15 Measured and predicted by ANN for SR of P-20 tool steel material....
Figure 30.16 Measured and predicted by ANN for AE
RMS
of titanium material.
Figure 30.17 Measured and predicted by ANN for AE
RMS
of P-20 tool steel materi...
Figure 30.18 Measured and predicted by ANN for EW of titanium material.
Figure 30.19 Measured and predicted by ANN for EW of P-20 tool steel material....
Figure 30.20 Measured and predicted by ANN for AE
RMS
of titanium material.
Figure 30.21 Measured and predicted by ANN for AE
RMS
of P-20 tool steel materi...
Guide
Cover Page
Table of Contents
Series Page
Title Page
Copyright Page
Preface
Begin Reading
Index
WILEY END USER LICENSE AGREEMENT
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Scrivener Publishing100 Cummings Center, Suite 541JBeverly, MA 01915-6106
Advances in Production Engineering
Series Editor: Dr. Sandip Kunar ([email protected])
“Advances in Production Engineering” addresses recent developments and research issues related to the production engineering which necessitates the development of new materials and manufacturing processes in order to produce high-quality products at lower prices and in less time. This series aims to provide a scientific platform for researchers, practitioners, professionals, and academicians to discuss the most recent technological developments in metals, polymers, ceramics, composites, biomaterials, nanomaterials, special materials, metals, micro-forming, powder metallurgy, ceramics processing, non-traditional machining, high speed machining, micro and nanomachining, and laser processing. Tribological analysis, friction behavior, modelling, and optimization techniques in materials, machining, and manufacturing are also covered in the series.
Publishers at ScrivenerMartin Scrivener ([email protected])Phillip Carmical ([email protected])
Advanced Machining and Micromachining Processes
Edited by
Sandip Kunar
Dept. of Mechanical Engineering, Aditya University, Surampalem, India
Norfazillah Binti Talib
Dept. of Manufacturing Engineering, Universiti Tun Hussein Onn Malaysia, Johor, Malaysia
and
Gurudas Mandal
Dept. of Metallurgical Engineering, Kazi Nazrul University, West Bengal, India
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Library of Congress Cataloging-in-Publication Data
ISBN 978-1-394-30169-0
Cover images provided by Adobe FireflyCover design by Russell Richardson
Preface
A key driver of a country’s socioeconomic development is its manufacturing sector. Competing on a global scale requires industries to produce goods that not only meet functional requirements but also minimize environmental impact. As a result, businesses are continually seeking innovative advanced machining and micromachining techniques that optimize efficiency while reducing environmental harm. This growing competitive pressure has spurred the development of sophisticated design and production concepts. Modern machining and micromachining methods have evolved to accommodate the use of newer materials across diverse applications, while ensuring precise machining accuracy.
The primary aim of this book is to explore and analyze various approaches in modern machining and micromachining processes, with a focus on their effectiveness and application in successful product development. Consequently, the book emphasizes an industrial engineering perspective. It is intended for a wide audience, including academics studying this expansive field, as well as researchers, industry practitioners, engineers, and research scientists.
This book covers a range of advanced machining and micromachining processes that can be utilized by the manufacturing industry to enhance productivity and contribute to socioeconomic development. Additionally, it highlights ongoing research projects in the field and provides insights into the latest advancements in advanced machining and micromachining techniques.
Chapter 1 delves into various technological domains, systematically examining techniques that exemplify precision and innovation. It provides a comprehensive overview of advanced machining and micromachining procedures, carefully uncovering the fundamental mechanics behind these methods. Chapter 2 focuses on abrasive jet machining, detailing the processes, equipment, process parameters, capabilities, applications, advantages, disadvantages, and underlying mechanisms. Chapter 3 then explores water jet machining, covering the process principles, key components, process parameters, capabilities, applications, as well as its benefits and drawbacks.
Chapter 4 details the principles of electro discharge machining, covering essential process requirements, equipment specifications, types of generators, electrode materials, selection of dielectric fluids, tool design, process parameters, machining characteristics, capabilities, advantages, disadvantages, and factors to consider when selecting machine tools. Chapter 5 focuses on wire-electro discharge machining, discussing its process principles, equipment details, parameters, machining characteristics, capabilities, applications, benefits, drawbacks, and metal removal aspects. Chapter 6 examines laser beam machining, explaining the lasing action, population inversion methods, types of lasers, process descriptions, beam parameters, capabilities, applications, advantages, and disadvantages. Chapter 7 explores plasma arc machining, describing the process, equipment, DC plasma torch operating modes, performance-influencing parameters, capabilities, applications, advantages, disadvantages, and safety precautions.
Chapter 8 explains the process, equipment details, characteristics, applications, advantages, and disadvantages of ion beam machining. Chapter 9 offers a comprehensive introduction to electrochemical machining, discussing its fundamentals, applications, and potential future developments, emphasizing its contribution to the advancement of micromanufacturing processes across various high-tech industries. Chapter 10 details ultrasonic machining, covering the process description, equipment, tool feed mechanism, abrasive slurry, liquid media, process characteristics, capabilities, applications, advantages, disadvantages, the material removal mechanism, and recent advancements in this technique.
Chapter 11 covers the theory, mechanics, equipment, process parameters, applications, advantages, and disadvantages of electron beam machining. Chapter 12 provides an overview of chemical machining, including process details, equipment, etchant influence, maskant and etchant selection, applications, and key characteristics. Chapter 13 examines electrochemical grinding (ECG), its variations for specific applications, advantages, challenges, and compares it with other grinding methods, concluding with ECG’s current state and future research recommendations.
Chapter 14 explores the photochemical machining process, covering the etching mechanism, experimental design, and parametric impacts, and identifies research gaps for future work. Chapter 15 offers insights into abrasive-assisted micromachining (AAM), summarizing key findings and its role in advancing precision manufacturing. Chapter 16 highlights advancements in abrasive materials, jet propulsion, and optimization techniques, enhancing the efficiency, precision, and sustainability of abrasive water jet micromachining (AWJM), expanding its applications and economic viability.
Chapter 17 covers the principles of electro discharge machining (EDM), focusing on material removal, key parameters, and differences between macro-EDM and micro-EDM for precision. Chapter 18 reviews recent developments in electrochemical micromachining (EMM), detailing mass removal rates, microtool feed rate selection, and challenges in predicting shape evolution. Chapter 19 provides an overview of ultrasonic micromachining, including principles, equipment, parameters, applications, and recent advancements.
Chapter 20 discusses laser surface modification techniques, focusing on their role in improving implant surface properties. Chapter 21 reviews focused ion beam processes, including standard, developed, and combined methods. Chapter 22 examines glass workpiece micromachining using electrochemical discharge machining with a three-pass tool feed to prevent bending. Chapter 23 provides a comprehensive overview of abrasive water jet machining, from principles to applications and trends, serving both academic and practical needs in manufacturing.
Chapter 24 covers ultrasonic vibration-assisted micromachining, focusing on its applications, capabilities, and limitations for difficult-to-cut materials. Chapter 25 highlights laser micromachining’s role in improving tool wear resistance, stress, and surface roughness in high-strength alloys, emphasizing key laser sources. Chapter 26 provides insights into research on the abrasive flow finishing process. Chapter 27 outlines the principles, advantages, and disadvantages of elastic emission machining. Chapter 28 offers a detailed overview of the magnetic abrasive finishing (MAF) process, including its components, mechanisms, parameters, and applications.
Chapter 29 explores the use of Genetic Algorithm (GA) for multi-objective optimization in machining, addressing conflicting performance measures. Fuzzy Grey Relation Analysis (GRA) is applied to refine GA results, achieving an optimal parametric combination for precision machining of VT20 titanium alloy using electro discharge machining. Chapter 30 examines the machining of Titanium Grade-2 and P-20 tool steel using the L16 orthogonal array, focusing on process parameters such as current, bed speed, pulse time, voltage, and flush rate in wire electric discharge machining. Chapter 31 highlights the importance of wet bulk micromachining in MEMS fabrication, providing an overview from basic crystallography and wet anisotropic etching to advanced silicon wafer manufacturing and micro-fabrication techniques for MEMS components.
We want to thank God first and foremost. Throughout the process of compiling this book, the truth of the gift of writing for everyone became apparent. You have bestowed upon us the ability to believe in devotion, diligence, and dream-chasing. Without the confidence in you, the Almighty, this would never have been possible.
We extend our sincere gratitude to all our friends and colleagues around the world who contributed suggestions and helped shape our ideas. We are especially thankful to the quality managers whose thoughtful insights greatly influenced this work. If experts in the fields of advanced machining and micromachining processes benefit from our efforts, it will greatly please us. We are also deeply appreciative of Martin Scrivener and the team at Scrivener Publishing and all our technical reviewers for their dedication to this extensive project. Their invaluable contributions were essential in bringing this book to completion.
Finally, but most definitely not least, we want to express our gratitude to all our well-wishers for their support. Many people from all backgrounds have generously assisted us while we produced this book. Without them, we might have given up.
The Editor
December 2024
1Overview of Advanced Machining and Micromachining Processes
M. Abdur Rahman1*, Serajul Haque1 and N. Sri Rangarajalu2
1Department of Mechanical Engineering, B. S. Abdur Rahman Crescent Institute of Science & Technology, Chennai, India
2Department of Production Technology, MIT Campus, Anna University, Chennai, India
Abstract
Motivated by an insatiable pursuit of precision and efficiency, the manufacturing landscape has undergone a transformative evolution driven by advanced and micromachining processes. This paradigm shift is rooted in the imperative to fabricate intricate components for diverse industries, necessitating unprecedented accuracy and intricacy. Micromachining, operating on a scale often measured in micrometers, thrives on specialized tools like laser ablation, micro-electro-discharge machining (micro-EDM), and photochemical machining, surpassing the constraints of conventional methodologies when dealing with minute features. The symbiosis between micromachining and advanced manufacturing processes catalyzes the development of micro-electromechanical systems, sensors, and biomedical devices, pushing technological boundaries. The synergy between micromachining and advanced manufacturing processes is a powerful force, paving the way for micro-electromechanical systems, sensors, and biomedical devices, pushing the frontiers of technology. This collaboration between industries striving for smaller, lighter, and more efficient products will undoubtedly shape the future of precision manufacturing. Beyond technical prowess, advanced and micromachining processes signify a philosophical shift in manufacturing, moving from mass production to tailored components that cater to specific and unique requirements. This comprehensive exploration delves into the heart of this transformative journey, analyzing the various processes that define precision and innovation. Each chapter dissects a distinct technique, revealing the underlying mechanisms propelling its capabilities and shedding light on recent research endeavors, providing a glimpse into the future of micromachining and its potential to redefine the manufacturing landscape. More than a technical treatise, this work invites readers to explore the frontiers of precision manufacturing, where human ingenuity and technological prowess converge to create possibilities once confined to the realm of imagination.
Keywords: Micromachining, advanced manufacturing, precision, efficiency
1.1 Introduction
The manufacturing sector has evolved significantly, propelled by a continuous quest for precision, efficiency, and innovation. This evolution is deeply rooted in the need to meet the ever-increasing demands of diverse industries, from aerospace to medical devices, where intricate components play a pivotal role in overall system performance. At the heart of this transformation lies the unyielding pursuit of precision and efficiency. As industries demand components with tighter tolerances and enhanced performance, traditional machining methods have given way to advanced machining and micromachining processes, heralding a new era in manufacturing. The emergence of advanced machining and micromachining processes stands as a testament to human ingenuity and technological progress. These cutting-edge technologies have not only redefined the possibilities within the manufacturing realm but have also opened doors to novel applications, pushing the boundaries of what was once deemed achievable [1].
The impact of these technologies on the manufacturing industry is revolutionary. The ability to produce components with unprecedented accuracy and intricacy has far-reaching implications, from improving the efficiency of existing systems to unlocking the potential for entirely new designs and functionalities. Micromachining and advanced manufacturing processes represent cutting-edge technologies that have revolutionized precision manufacturing on a miniature scale. In the realm of micromachining, precision is paramount as it involves the fabrication of extremely small components with dimensions typically ranging from a few micrometers to a few millimeters. This field has gained prominence due to the increasing demand for miniaturized devices in various industries such as electronics, medical, aerospace, and telecommunications [2].
At the heart of micromachining lies the ability to fabricate intricate structures with high accuracy. Traditional machining techniques often face limitations when dealing with features on a microscale. In contrast, micromachining employs specialized tools, techniques, and technologies tailored to handle the challenges posed by miniaturization. These processes include precision machining, laser ablation, micro-electro-discharge machining (micro-EDM), and photochemical machining, among others. The integration of micromachining and advanced manufacturing processes has far-reaching implications. It facilitates the development of micro-electromechanical systems (MEMS), sensors, biomedical devices, and other intricate components critical to modern technology. As industries continue to demand smaller, lighter, and more efficient products, the synergy between micromachining and advanced manufacturing will undoubtedly play a pivotal role in shaping the future of precision manufacturing. This introduction merely scratches the surface of the vast landscape of possibilities that emerge at the intersection of micromachining and advanced manufacturing processes [3, 4].
One of the hallmark features of advanced machining and micromachining processes is their ability to achieve levels of accuracy that were once considered unattainable. This newfound precision is a game-changer for industries where even the slightest deviation can have significant consequences. Intricacy in component design has reached unprecedented levels, thanks to the capabilities of these processes. Microscale features, intricate geometries, and complex structures are now achievable with a level of detail that was once inconceivable, opening avenues for innovation in product design and functionality. The advent of advanced machining and micromachining processes represents more than just a technological shift. It signifies a paradigm shift in the philosophy of manufacturing itself. The focus is no longer solely on mass production but on the ability to tailor components with precision, catering to specific and often unique requirements.
In recent years, advancements in advanced machining and micromachining processes have been instrumental in pushing the boundaries of precision manufacturing. These breakthroughs have not only enhanced the capabilities of existing technologies but have also given rise to novel methodologies, shaping the future of the manufacturing industry. For example, laser machining can achieve ultimate precision and is a promising approach for advanced materials and structures, with applications from nanometers to atomic scales [5].
Recent breakthroughs in micro-milling focus on the development of ultra-small cutting tools with enhanced durability and wear resistance. Furthermore, advancements in precision control systems enable real-time adjustments, ensuring consistent and accurate micromachining even in dynamic conditions. In laser micromachining, advancements include the integration of ultrafast laser systems, allowing for precise ablation with minimal thermal effects. The use of novel beam shaping techniques and adaptive optics enhances the versatility of laser micromachining for a wider range of materials. Micro-EDM is a useful process for manufacturing micro components and parts in difficult-to-machine materials, but improvements in material removal rate, surface finish, tool wear, and dimensional accuracy are needed. Micro-EDM has seen improvements in electrode materials and tool design, enabling higher machining accuracy and reduced tool wear. Additionally, advancements in real-time monitoring systems provide enhanced control over the micromachining process, ensuring optimal results [6, 7].
Embarking on the exploration of advanced and micromachining processes, each subsequent chapter is dedicated to unraveling the intricacies, applications, and advancements that characterize these cutting-edge technologies. The journey through these chapters spans from foundational principles to the cutting edge of research and development, presenting a comprehensive panorama that delineates the future trajectory of manufacturing.
This book navigates diverse technological realms, systematically analyzing processes emblematic of precision and innovation. Each chapter addresses a distinct advanced or micromachining process, methodically uncovering layers to reveal the underlying mechanisms propelling these techniques. Furthermore, the book illuminates recent research endeavors within the micromachining domain, providing insights into contemporary developments in the field.
1.1.1 Classification of Advanced Machining and Micromachining Processes
Advanced machining and micromachining processes encompass a diverse array of techniques, each tailored to specific applications and materials. Classifying these processes helps provide a systematic understanding of their underlying principles and applications. The classification can be broadly categorized into two main groups: traditional advanced machining and emerging micromachining processes.
1.1.1.1 Mechanical Machining
Mechanical machining refers to the process of using mechanical tools and machines to shape, cut, or form materials into a desired shape or size. This process is commonly used in manufacturing and fabrication industries to produce precision components and parts. Mechanical machining techniques are diverse and can be applied to various materials, including metals, plastics, and composites. Here are some common mechanical machining methods:
High-speed machining (HSM): high-speed machining involves elevated cutting speeds and feeds, optimizing material removal rates [8].
Applications:
Aerospace components
: production of aircraft structural components and engine parts.
Automotive parts
: manufacturing of precision automotive components like gears and engine parts.
Die and mold manufacturing:
rapid and precise machining of dies and molds.
1.1.1.2 Abrasive Waterjet Machining (AWJM)
Abrasive waterjet machining (AWJM) employs a high-velocity jet of water mixed with abrasive particles for material removal [9].
Applications:
Composite cutting
: precision cutting of composite materials used in aerospace and automotive industries.
Stone and glass shaping
: sculpting and shaping of architectural stone and glass components.
Metal cutting
: versatile cutting method for metals in various industrial applications.
1.1.1.3 Abrasive Jet Machining (AJM)
Abrasive jet machining (AJM) uses a high-velocity stream of abrasive particles for material removal and surface finishing [10].
Applications:
Deburring
: removing burrs from machined components for smooth surfaces.
Cleaning
: precision cleaning of delicate surfaces without damaging the material.
Etching
: controlled material removal for artistic or functional etching applications.
1.1.1.4 Ultrasonic Machining (USM)
Ultrasonic machining (USM) utilizes ultrasonic vibrations to induce abrasive particle impact on the workpiece [11].
Applications:
Micro-hole drilling
: creating small and precise holes in materials like ceramics.
Machining brittle materials:
precision machining of materials prone to chipping or cracking.
Micro-electronics
: fabrication of intricate shapes in micro-electronic components.
1.1.1.5 Grinding and Superfinishing
Grinding involves abrasive particles removing material, and superfinishing provides ultrasmooth surface finishes [12].
Applications:
Tool and die making
: precision grinding for the production of tools and dies.
Automotive and aerospace components:
surface finishing for critical components.
Tight tolerance parts
: achieving tight tolerances in critical parts for various industries.
These mechanical machining processes play a crucial role in achieving precision and versatility across a broad spectrum of applications, contributing to the production of high-quality components in diverse industries.
1.2 Electrical Machining
Electrical machining refers to a group of manufacturing processes that use electrical energy to remove material from a workpiece. These processes are typically used for shaping or finishing hard materials that are difficult to machine with traditional methods. Electrical machining techniques are widely used in various industries, including aerospace, automotive, electronics, and tool manufacturing.
1.2.1 Electrical Discharge Machining (EDM)
Electrical discharge machining (EDM) utilizes electrical discharges to erode material from the workpiece.
Applications:
Dies and molds
: production of intricate dies and molds for various industries.
Aerospace components
: machining complex and hardened aerospace components.
Medical device manufacturing
: precision machining of small, intricate medical components
[13]
.
1.2.2 Wire-Electrical Discharge Machining (Wire-EDM)
Wire-EDM employs a continuously moving wire as an electrode for precision cutting.
Applications:
Prototyping:
rapid prototyping of complex parts with tight tolerances.
Precision machining
: machining of intricate and small components for various industries.
Aerospace production
: production of precision components for aerospace applications
[13]
.
1.2.3 Electrochemical Machining (ECM)
Electrochemical machining (ECM) removes material through an electrochemical reaction between the workpiece and electrode.
Applications [14]:
Turbine blades
: precision machining of complex shapes in turbine blades.
Medical components:
production of intricate medical components with high precision.
Aerospace parts
: machining of aerospace components from difficult-tomachine materials.
Micro-electrochemical machining (micro-ECM) has been widely used for microscale and nanoscale processing of materials. A recent work introduced a nanosecond pulse power supply for micro-electrochemical machining, utilizing an STM32F103VET6 microcomputer and a metal-oxide-semiconductor field-effect transistor. The supply achieves a continuous pulse with an 8-MHz frequency, a 50-ns pulse width, a 12-A peak current, and a 10-V maximum voltage. Compared to existing supplies, it exhibits enhanced output and improved waveforms, promising increased machining accuracy and efficiency in micro-ECM [15].
1.2.4 Electrochemical Grinding (ECG)
Electrochemical grinding (ECG) combines grinding with electrochemical machining for enhanced material removal.
Applications [16]:
Precision grinding
: grinding of complex shapes and hard materials with high precision.
Aerospace and automotive components
: surface finishing for precision components.
Tool and die making
: producing tools and dies with tight tolerances.
These electrical machining processes are essential for achieving intricate shapes, high precision, and efficient material removal in applications ranging from aerospace and automotive manufacturing to medical device production and beyond.
1.3 Thermal Machining
Thermal machining is a group of manufacturing processes that remove material by using heat as the primary energy source. It is also known as non-traditional machining or advanced machining. Thermal machining processes are used to machine materials that are difficult or impossible to machine using traditional machining methods, such as milling, turning, and drilling.
1.3.1 Laser Beam Machining (LBM)
Laser beam machining (LBM) utilizes a high-energy laser beam for material removal through vaporization, melting, or thermal deformation.
Applications [17]:
Cutting and welding
: precision cutting of metals and non-metals, as well as welding in various industries.
Micro-electronics
: drilling micro-sized holes and shaping intricate features in electronic components.
Medical device manufacturing
: precision machining of medical implants and devices.
1.3.2 Plasma Arc Machining (PAM)
Plasma arc machining (PAM) employs a high-temperature, ionized gas (plasma) to melt and remove material from the workpiece.
Applications [18]:
Cutting of electrically conductive materials
: precision cutting of metals like aluminum, steel, and copper.
Aerospace industry
: shaping and cutting components for aerospace applications.
Metal fabrication:
applications in metal fabrication industries for high-speed cutting.
1.3.3 Electron Beam Machining (EBM)
Electron beam machining (EBM) utilizes a focused beam of electrons for material removal through vaporization.
Applications [18]:
Welding
: high-precision welding of intricate components in aerospace and medical industries.
Precision drilling
: drilling small, precise holes in hard materials for various applications.
Research and development
: used in scientific research for precise material removal in controlled environments.
Thermal machining processes offer versatility and precision in various applications, making them indispensable in industries where intricate shapes, fine details, and minimal heat-affected zones are crucial.
1.4 Chemical Machining
Chemical machining, also known as industrial etching or chemical milling, is a subtractive manufacturing process that uses chemical reactions to remove material from a workpiece to create the desired shape. It is a non-traditional machining process that is often used to produce intricate and complex shapes that would be difficult or impossible to create with traditional machining methods, such as milling, turning, and drilling.
1.4.1 Chemical Machining (CHM)
Chemical machining (CHM) involves the selective removal of material through chemical reactions, typically using etchants.
Applications [19]:
Aerospace industry
: production of lightweight aerospace components with intricate geometries.
Electronics manufacturing
: fabrication of printed circuit boards (PCBs) and semiconductor components.
Medical device production
: precision machining of components for medical implants.
1.4.2 Photochemical Machining (PCM)
Photochemical machining (PCM) uses photoresist coatings and light to selectively remove material through chemical etching.
Applications [20]:
Micro-electronics
: production of micro-electronic components with intricate patterns.
Precision components:
manufacturing of intricate and delicate components for various industries.
Automotive parts
: fabrication of precision components in the automotive sector.
Chemical machining processes are particularly valuable when intricate and detailed features are required, and traditional mechanical methods may be impractical or inefficient. They find applications in industries where precision and intricate designs are essential for the final product’s functionality and performance.
1.5 Mechanical Micromachining
1.5.1 Micro-Milling
Micro-milling is a downscaled version of traditional milling processes adapted for microscale machining, utilizing miniature cutting tools.
Applications [21]:
Microfabrication
: production of small and intricate components for microsystems.
Medical devices
: manufacturing of miniaturized components for medical devices.
Electronics
: precision machining of small features in electronic components.
1.5.2 Abrasive Water Jet Micromachining (AWJMM)
Abrasive water jet micromachining (AWJMM) uses a high-velocity jet of water mixed with abrasive particles for microscale material removal.
Applications [22]:
Micro-cutting
: precision cutting of small features in various materials.
Micro-drilling
: creating micro-sized holes in delicate materials.
Microfabrication
: Shaping microscale components for electronic and medical applications.
1.5.3 Abrasive-Assisted Machining
Abrasive-assisted machining involves the use of abrasive particles to enhance material removal in microscale machining.
Applications [23]:
Surface finishing
: achieving fine surface finishes in microscale components.
Micromachining
: enhancing precision in the fabrication of small features.
Tool fabrication
: production of miniature tools for micromachining processes.
1.6 Electrical Micromachining
1.6.1 Electrical Discharge Micromachining (EDMM)
Electrical discharge micromachining (EDMM) is a downscaled version of EDM adapted for microscale applications.
Applications [24]:
Micro-drilling
: precision drilling of micro-sized holes in various materials.
Micro-milling
: fabrication of intricate microscale features in small components.
Micro-tooling
: production of miniature tools for MEMS.
1.6.2 Electro-Chemical Discharge Machining (ECDM)
Electro-chemical discharge machining (ECDM) combines electrochemical machining with electrical discharge machining for microscale material removal.
Applications [25]:
Micromachining
: precision machining of small features in micro-electronic components.
Micro-mold making
: production of microscale molds for small parts.
Biomedical devices
: fabrication of microscale components for biomedical applications.
Table 1.1 shows the list of mechanical micromachining operations and its applications [21–25]. Emerging micromachining processes are critical for the fabrication of miniature components used in electronics, medical devices, and microsystems. These processes enable precision at the microscale, pushing the boundaries of what can be achieved in manufacturing small and intricate features.
Table 1.1 Summarizes the mechanical micromachining operations and its applications [21–25].
Micromachining technique
Type of operation
Applications
Products
References
Micro-milling
Mechanical cutting with miniature tools
Microfabrication, medical devices, electronics
MEMS gyroscopes, miniature surgical tools, electronic circuit components
[21]
Abrasive water jet micromachining (AWJMM)
Abrasive water jet erosion
Micro-cutting, micro-drilling, microfabrication
Microfluidic channels, precision watch components, biocompatible microstructures
[22]
Abrasive-assisted machining
Mechanical cutting with abrasive particles
Surface finishing, micromachining, tool fabrication
Micro lenses, microfluidic devices, miniature cutting tools
[23]
Electrical discharge micromachining (EDMM)
Controlled sparking for material removal
Micro-drilling, micro-milling, micro-tooling
Microfluidic injectors, biocompatible microsensors, miniature nozzles
[24]
Electro chemical discharge machining (ECDM)
Combined electrochemical and sparking removal
Micromachining, micro-mold making, biomedical devices
Microfluidic pumps, drug delivery microchips, microscale implants
[25]
1.7 Thermal Micromachining
1.7.1 Laser Beam Micromachining (LBM)
Laser beam micromachining (LBM) at the microscale utilizes a focused laser beam for precise material removal through vaporization or thermal ablation.
Applications [26]:
Micro-electronics
: laser ablation for microfabrication of electronic components.
Medical devices
: precision machining of miniature components for medical implants.
Micro-drilling
: creation of micro-sized holes in various materials.
1.7.2 Plasma Arc Micromachining
Plasma arc micromachining involves using a high-temperature, ionized gas (plasma) for microscale material removal.
Applications [27]:
Micro-cutting
: precision cutting of small features in metals and other conductive materials.
Micro-welding
: welding of miniature components in microsystems.
Aerospace components
: shaping and cutting microscale components for aerospace applications.
1.7.3 Laser-Assisted Micromachining
Laser-assisted micromachining combines traditional micromachining methods with laser assistance for improved material removal.
Applications [28]:
Micro-milling
: enhancing precision in milling processes at the microscale.
Surface modification:
laser-assisted techniques for microscale surface treatments.
Micro-drilling:
improved precision in creating micro-sized holes.
1.8 Chemical Micromachining
1.8.1 Chemical Micromachining (CMM)
Chemical micromachining (CMM) at the microscale utilizes chemical reactions for precise material removal.
Applications [29]:
Microfabrication
: etching intricate patterns in micro-electronic components.
MEMS production
: fabrication of micro-electromechanical systems with precise features.
Biomedical devices
: precision machining of microscale components for medical applications.
1.8.2 Electrochemical Micromachining (ECMM)
Electrochemical micromachining (ECMM) involves the selective dissolution of material through electrochemical reactions at the microscale.
Applications [30]:
Micromachining:
production of micro-sized features in various materials.
Microfluidics:
fabrication of microchannels for fluidic devices.
Microsensor manufacturing:
precision machining of sensors for microsystems.
1.8.3 Chemo-Mechanical Polishing (CMP)
Chemo-mechanical polishing (CMP) combines chemical and mechanical processes to achieve precision polishing and planarization at the microscale.
Applications [30]:
Semiconductor manufacturing
: polishing and planarization of semiconductor wafers.
Optical components
: finishing and polishing of microscale optical components.
MEMS devices
: surface treatment for micro-electromechanical systems.
These thermal and chemical micromachining processes enable the production of intricate and small-scale components, contributing to advancements in micro-electronics, medical devices, and various other industries requiring high precision at the microscale.
1.9 Ultrasonic Micromachining
1.9.1 Ultrasonic Micromachining (USMM)
Ultrasonic micromachining (USMM) employs ultrasonic vibrations to induce abrasive particle impact for material removal at the microscale.
Applications [31]:
Micro-drilling
: precision drilling of micro-sized holes in various materials.
Micro-milling
: shaping and machining small features with high accuracy.
Micro-electronics
