Hybrid Micromachining and Microfabrication Technologies E-Book
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- Herausgeber: John Wiley & Sons
- Kategorie: Fachliteratur
- Serie: Innovations in Materials and Manufacturing
- Sprache: Englisch
HYBRID MICROMACHINING and MICROFABRICATION TECHNOLOGIES The book aims to provide a thorough understanding of numerous advanced hybrid micromachining and microfabrication techniques as well as future directions, providing researchers and engineers who work in hybrid micromachining with a much-appreciated orientation. The book is dedicated to advanced hybrid micromachining and microfabrication technologies by detailing principals, techniques, processes, conditions, research advances, research challenges, and opportunities for various types of advanced hybrid micromachining and microfabrication. It discusses the mechanisms of material removal supported by experimental validation. Constructional features of hybrid micromachining setup suitable for industrial micromachining applications are explained. Separate chapters are devoted to different advanced hybrid micromachining and microfabrication to design and development of micro-tools, which is one of the most vital components in advanced hybrid micromachining, and which can also be used for various micro and nano applications. Power supply, and other major factors which influence advanced hybrid micromachining processes, are covered and research findings concerning the improvement of machining accuracy and efficiency are reported.
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Veröffentlichungsjahr: 2023
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Table of Contents
Cover
Series Page
Title Page
Copyright Page
Dedication Page
Preface
Acknowledgement
1 Overview of Hybrid Micromachining and Microfabrication Techniques
1.1 Introduction
1.2 Classification of Hybrid Micromachining and Microfabrication Techniques
1.3 Challenges in Hybrid Micromachining
1.4 Conclusions
1.5 Future Research Opportunities
References
2 A Review on Experimental Studies in Electrochemical Discharge Machining
2.1 Introduction
2.2 Historical Background
2.3 Principle of Electrochemical Discharge Machining Process
2.4 Basic Mechanism of Electrochemical Discharge Machining Process
2.5 Application of ECDM Process
2.6 Literature Review on ECDM
2.7 Conclusion
Acknowledgments
References
3 Laser-Assisted Micromilling
3.1 Introduction
3.2 Laser-Assisted Micromilling
3.3 Conclusion
References
4 Ultrasonic-Assisted Electrochemical Micromachining
4.1 Introduction
4.2 Ultrasonic Effect
4.3 Experimental Procedure
4.4 Results and Discussion
4.5 Conclusions
References
5 Micro-Electrochemical Piercing on SS 204
5.1 Introduction
5.2 Experimentation on SS 204 Plates With Cu Tool Electrodes
5.3 Results and Discussions
5.4 Conclusions
References
6 Laser-Assisted Electrochemical Discharge Micromachining
6.1 Introduction
6.2 Experimental Procedure
6.3 Results and Discussion
6.4 Conclusions
References
7 Laser-Assisted Hybrid Micromachining Processes and Its Applications
7.1 Introduction
7.2 Laser-Assisted Hybrid Micromachining
7.3 Laser-Assisted Traditional-HMMPs
7.4 Laser-Assisted Nontraditional HMMPs
7.5 Capabilities and Shortfalls of LA-HMMPs
7.6 Conclusion
Acknowledgment
References
8 Hybrid Laser-Assisted Jet Electrochemical Micromachining Process
8.1 Introduction
8.2 Overview of Electrochemical Machining
8.3 Importance of Electrochemical Micromachining
8.4 Fundamentals of Electrochemical Micromachining
8.5 Major Factors of EMM
8.6 Jet Electrochemical Micromachining
8.7 Laser as Assisting Process
8.8 Laser-Assisted Jet Electrochemical Micromachining (LA-JECM)
8.9 Applications of LAJECM
References
9 Ultrasonic Vibration-Assisted Microwire Electrochemical Discharge Machining
9.1 Introduction
9.2 Experimental Setup
9.3 Results and Discussion
9.4 Conclusions
References
10 Study of Soda-Lime Glass Machinability by Gunmetal Tool in Electrochemical Discharge Machining and Process Parameters Optimization Using Grey Relational Analysis
10.1 Introduction
10.2 Experimental Conditions
10.3 Analysis of Average MRR of Workpiece (Soda-Lime Glass) Through Gunmetal Electrode
10.4 Analysis of Average Depth of Machined Hole on Soda-Lime Glass Through Gunmetal Electrode
10.5 Analysis of Average Diameter of Hole of Soda-Lime Glass Through Gunmetal Electrode
10.6 Grey Relational Analysis Optimization of Soda-Lime Glass Results by Gunmetal Electrode
10.7 Conclusion
Acknowledgments
References
11 Micro Turbine Generator Combined with Silicon Structure and Ceramic Magnetic Circuit
11.1 Introduction
11.2 Concept
11.3 Fabrication Technology
11.4 Designs and Experiments
11.5 Results and Discussion
11.6 Conclusions
Acknowledgment
References
12 A Review on Hybrid Micromachining Process and Technologies
12.1 Introduction
12.2 Characteristics of Hybrid-Micromachining
12.3 Bibliometric Survey of Micromachining to Hybrid-Micromachining
12.4 Material Removal in Microsizes
12.5 Nontraditional Hybrid-Micromachining Technologies
12.6 Classification of Techniques Used for Micromachining to Hybrid-Micromachining
12.7 Materials Are Used and Application of Hybrid-Micromachining
12.8 Conclusions
References
13 Material Removal in Spark-Assisted Chemical Engraving for Micromachining
13.1 Introduction
13.2 Essentials of SACE
13.3 Genesis of SACE Acronym: A Brief Historical Survey
13.4 SACE: A Viable Micromachining Technology
13.5 Material Removal Mechanism in SACE µ-Machining
13.6 SACE µ-Machining Process Control
13.7 Conclusion and Scope for Future Work
References
Index
End User License Agreement
List of Tables
Chapter 2
Table 2.1 Developments in the ECDM process from past to present.
Table 2.2 Brief overview of past research work based on workpiece material, to...
Chapter 5
Table 5.1 Values of process parameters for designing the experiments on ss 204...
Table 5.2 Experimental Results for Micro-ECM Milling on SS 204.
Chapter 7
Table 7.1 Process parameters and their effects.
Chapter 8
Table 8.1 Significant material properties for LAJECM process [13].
Chapter 10
Table 10.1 Input parameters and different levels.
Table 10.2 Microscopic images of each experimental condition results.
Table 10.3 Observations of soda-lime glass material through gunmetal electrode...
Table 10.4 ANOVA for Average MRR of Soda-Lime Glass Workpiece by Gunmetal Elec...
Table 10.5 Response table for Average MRR.
Table 10.6 ANOVA table for Average machined depth.
Table 10.7 Response table of Average machined depth.
Table 10.8 ANOVA table for Average hole diameter.
Table 10.9 Response table for Average hole diameter (Nominal is better).
Table 10.10 Grey relational analysis table for soda-lime glass material throug...
Table 10.11 Response table for the average grey relational grade.
Chapter 11
Table 11.1 Each parameter of the analysis.
Table 11.2 The measurement result of the inlet side.
Table 11.3 The measurement result of the recovery side.
List of Illustrations
Chapter 2
Figure 2.1 ECDM experimental setup.
Figure 2.2 Percentage of materials used as workpiece in ECDM.
Figure 2.3 Percentage of cathode tools used in ECDM.
Figure 2.4 Percentage of electrolytes used in ECDM.
Figure 2.5 Percentage of input parameters used in ECDM.
Figure 2.6 Percentage of output parameters used in ECDM.
Figure 2.7 Number of experimental studies publications in ECDM from Table 2.2.
Chapter 3
Figure 3.1 Illustration of laser-assisted micromilling.
Figure 3.2 Illustration of laser-assisted micromilling along with (a) softened...
Figure 3.3 Schematic of laser-induced oxidation-assisted micromilling.
Figure 3.4 Schematic representing material removal mechanism of micromilling h...
Figure 3.5 The Illustration of material removal procedure. (a) Removal of oxid...
Chapter 4
Figure 4.1 Experimental setup [18].
Figure 4.2 Machined micropattern without ultrasonic assistance [18].
Figure 4.3 Array of microholes using electrolyte jet [18].
Chapter 5
Figure 5.1 Micro-ECM machining setup for SS 204.
Figure 5.2 Surface plot for MRR.
Figure 5.3 Surface plot for TWR.
Figure 5.4 Surface plot for ROC.
Chapter 6
Figure 6.1 Experimental apparatus of ECDM [26].
Figure 6.2 Picosecond laser machining system [26]
Figure 6.3 Cross-sectional structures of microgrooves correspondingly produced...
Figure 6.4 Protrusions difference of microgrooves processes by ECDM and hybrid...
Figure 6.5 Comparison of microgrooves processed by combination method and ECDM...
Chapter 7
Figure 7.1 Laser generation system.
Figure 7.2 Laser ablation phenomena [5].
Figure 7.3 Various phases of laser ablation.
Figure 7.4 Process and performance parameters of LBMM.
Figure 7.5 General classification of LA-HMMPs.
Figure 7.6 Various modes of LAMT process; (a) application of laser infront of ...
Figure 7.7 Effect of laser power on surface roughness [19].
Figure 7.8 SEM images (a) unmachined surface; (b) turned surface without laser...
Figure 7.9 Schematic of LAMD process.
Figure 7.10 Schematic view of LAMM process; (a) softened area; (b) structures ...
Figure 7.11 Detail of LAGM process, (a) schematic view of setup (b) experiment...
Figure 7.12 SEM of surface damages, (a) Conventional grinding (b) LAMG process...
Figure 7.13 Sequential application of LBM and EDMM in LA-EDMM process.
Figure 7.14 SEM images drilled holes; (a) EDMM process; (b ) LA-EDMM process [...
Figure 7.15 Drilled holes by different processes; (Laser pilot hole); (b) EDM ...
Figure 7.16 Hybridization of ECJMM and laser beam; (a) ECJMM without laser pro...
Figure 7.17 LA-WJMM process and process parameters [49].
Figure 7.18 Principle of WJGL process [52].
Chapter 8
Figure 8.1 Basic working principle of electrochemical machining.
Figure 8.2 Electrolyte characteristics vary by machining length.
Figure 8.3 Classification of electrochemical micromachining process.
Figure 8.4 Nozzle jet assembly setup.
Figure 8.5 Schematic representation of jet EMM setup.
Figure 8.6 Electrolyte jet and laser functions in LAJECM.
Figure 8.7 (a) Jet-ECM (b) LAJECM.
Figure 8.8 LAJECM process.
Figure 8.9 Localization effect in LA-JECM.
Figure 8.10 Localized machining zone in LAJECM.
Figure 8.11 Mechanism for energy distribution.
Figure 8.12 Electrolyte temperature and laser-localized area temperature as a ...
Figure 8.13 Influences of electrolyte concentration of LAJECM on MRR [12].
Figure 8.14 Influences of duty cycles of LAJECM on taper angle [12].
Figure 8.15 Measurements of taper and overcut.
Figure 8.16 SEM analysis for cross-section views of hole and surface roughness...
Figure 8.17 Surface roughness for titanium alloy, hastelloy, stainless steel, ...
Chapter 9
Figure 9.1 Experimental platform [23].
Figure 9.2 Effect of amplitude on micro slit [23].
Figure 9.3 Micro slits (a) without ultrasonic vibration and (b) with ultrasoni...
Figure 9.4 Influence of voltage on micro slit [23].
Figure 9.5 Effect of duty factor on micro slit [23].
Figure 9.6 Effect of frequency on micro slit [23].
Figure 9.7 Microplanar coil structure and entrance slit width. (a) Front view;...
Figure 9.8 Structure of glass microcantilever (a) columnar microcantilever (b)...
Chapter 10
Figure 10.1 Electrochemical discharge (ECDM) machine setup.
Figure 10.2 Experiments results 1 of soda-lime glass through gunmetal electrod...
Figure 10.3 Experiments results 2 of soda-lime glass through gunmetal electrod...
Figure 10.4 Average MRR of soda-lime glass workpiece by gunmetal electrode.
Figure 10.5 Main effect plot for average machined depth.
Figure 10.6 Main effect plot for Average hole diameter.
Chapter 11
Figure 11.1 Schematic illustration of ORC power generation system.
Figure 11.2 Schematic illustration of the fabrication process for the silicon ...
Figure 11.3 Fabrication process of multilayer ceramic technology.
Figure 11.4 Fabrication process for complex structures (a) single-phase coil (...
Figure 11.5 Design of single-phase type miniature power generation part that c...
Figure 11.6 Designed single-phase turbine (a) arrangement of parts (b) rotor b...
Figure 11.7 Multilayer ceramic magnetic circuit of single-phase.
Figure 11.8 Design of combined three-phase type turbine and magnetic circuit (...
Figure 11.9 Designed three-phase type turbine and components.
Figure 11.10 Designed three-phase type magnetic circuit.
Figure 11.11 Schematic diagram of the experimentation of the rotation.
Figure 11.12 Designs of the proposed rotor (a) sharp design (b) blunt angle de...
Figure 11.13 State of the rotation experiment using a low boiling point medium...
Figure 11.14 Silicon components of MEMS turbine for the single-phase and three...
Figure 11.15 Assembled turbine structures of the single-phase and three-phase.
Figure 11.16 Ceramic single-phase magnetic circuit.
Figure 11.17 Ceramic three-phase magnetic circuit.
Figure 11.18 Combined turbine generators (a) single-phase generator (b) three-...
Figure 11.19 Output voltage and output power applied at each load resistance.
Figure 11.20 Output waveforms in generator of single-phase.
Figure 11.21 Output results that apply each load resistance and maximum rotati...
Figure 11.22 Output waveform of three-phase type generator.
Figure 11.23 Analysis result of designed magnetic structures (a) square shape ...
Figure 11.24 Analysis model of three-phase circuit and magnet.
Figure 11.25 Phase difference error of three-phase output waveform.
Figure 11.26 Fabricated two type shape rotor (a) sharp design (b) blunt angle ...
Figure 11.27 Result of rotational speeds at each rotor design.
Figure 11.28 Results of the observation of the damaged rotor.
Figure 11.29 Output waveform with low boiling point material.
Figure 11.30 Schematic illustration of phase change observation (a) model (b) ...
Figure 11.31 Temperature changes results.
Chapter 12
Figure 12.1 Different classes of manufacturing processes.
Figure 12.2 Different classes of machining processes.
Figure 12.3 Bibliometric analysis of (a) micromachining processes and (b) hybr...
Figure 12.4 Documents by country or territory of hybrid-micromachining process...
Figure 12.5 Documents by subject area use of hybrid-micromachining processes.
Figure 12.6 Different machining processes have different amount of material re...
Figure 12.7 Micromachining (Taniguchi equivalent for cutting processes) accura...
Figure 12.8 Hybrid-micromachining processes.
Guide
Cover Page
Series Page
Title Page
Copyright Page
Dedication Page
Preface
Acknowledgement
Table of Contents
Begin Reading
Index
WILEY END USER LICENSE AGREEMENT
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Scrivener Publishing100 Cummings Center, Suite 541JBeverly, MA 01915-6106
Innovations in Materials and Manufacturing
Series Editor: Prasenjit Chatterjee
Scope: “Innovations in Materials and Manufacturing” series addresses recent developments and research issues related to the productive use of materials and manufacturing processes, which necessitates the development of newer materials and manufacturing processes in order to produce high-quality products at lower prices in less time. This series aims to provide a scientific platform for researchers, practitioners, professionals, and academics to discuss the most recent technological developments in metals, polymers, ceramics, composites, biomaterials, nanomaterials, special materials, metals, microforming, powder metallurgy, ceramics processing, non-traditional machining, high speed machining, micro and nanomachining, and laser processing. Tribological analysis, friction behavior, modeling, and optimization techniques in materials, machining, and manufacturing are also covered in this series.
Submission to the series:Dr. Prasenjit Chatterjee, Department of Mechanical Engineering, MCKV Institute of Engineering, Howrah - 711204, West Bengal, IndiaE-Mail: [email protected]
Publishers at ScrivenerMartin Scrivener ([email protected])Phillip Carmical ([email protected])
Hybrid Micromachining and Microfabrication Technologies
Principles, Varieties and Applications
Edited by
Sandip Kunar
Department of Mechanical Engineering, Aditya Engineering College, A.P., India
Golam Kibria
Department of Mechanical Engineering, Aliah University, Kolkata, India
Prasenjit Chatterjee
Department of Mechanical Engineering, MCKV Institute of Engineering, Howrah, India
and
Asma Perveen
Department of Mechanical & Aerospace Engineering, School of Engineering & Digital Sciences, Nazarbayev University, Republic of Kazakhstan
This edition first published 2023 by John Wiley & Sons, Inc., 111 River Street, Hoboken, NJ 07030, USA and Scrivener Publishing LLC, 100 Cummings Center, Suite 541J, Beverly, MA 01915, USA© 2023 Scrivener Publishing LLCFor more information about Scrivener publications please visit www.scrivenerpublishing.com.
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Library of Congress Cataloging-in-Publication Data
ISBN 978-1-394-17447-8
Cover image: Pixabay.ComCover design by Russell Richardson
The Editors would like to dedicate this book to their parents, life partners, children, students, scholars, friends and colleagues.
Preface
The advancement and subsequent widespread usage of hybrid micromachining and microfabrication technologies have been propelled by the significant need for superior quality in manufactured goods, particularly those of micro-level size and constructed from advanced materials. Hybrid micromachining and microfabrication technologies are variations of advanced machining processes, which combine two or more advanced manufacturing processes with a traditional metalworking procedure (often some types of machining process) to produce outputs that are not attainable with the constituent processes acting alone.
To improve the machining rate and/or surface quality, hybrid micromachining, and microfabrication technologies may also use a fluid, abrasive medium, and an additional external energy source. Due to better machining and surface quality, hybrid micromachining and microfabrication technologies are gradually making their way into the majority of production across the globe. Hybrid micromachining and microfabrication technologies have proven to have a considerable advantage over traditional applications. The main benefits are their capacity for machining exceptionally advanced materials, as well as the production of increased surface integrity characteristics.
This book primarily aims to offer a broader perspective on some of the most significant hybrid micromachining and microfabrication technologies utilized for those goals, and to act as a source for understanding the fundamental principles of various methods. As an opening stage into the world of hybrid micromachining and microfabrication technologies, this book intends to satisfy the requirements of academicians, professionals, and researchers in the domains of mechanistic and manufacturing engineering.
Chapter 1 introduces unique categorization and analyses of the previous and current exploration and functions of the hybrid micromachining and microfabrication procedures, and it emphasizes the influence on performance characteristics.
Chapter 2 demonstrates a brief review of the work done on ECDM in various fields, including history, design, workpiece, electrolyte, tool electrode, and input and output parameters used in ECDM.
Chapter 3 provides an overview of laser-assisted micro milling and hard-to-machine materials such as steel, Ti alloy, Ni alloy, cementite carbides, and other ceramics that are used in laser-assisted micro milling.
Chapter 4 describes how various processing properties are affected by machining factors including electrode feed rate, operating voltage, and ultrasonic vibration amplitude, and the outcomes of experimentation demonstrates that the periodic pressure difference for the electrolyte is produced by the vibrating electrode array supported by ultrasonics.
Chapter 5 discusses the reduction of tool wear and overcut without the addition of any external force, and how the concentration of NaCl electrolyte played a vital role in improving the performance features of micro-electrochemical machining of SS 204.
Chapter 6 explains the laser-aided ECDM for glass micro grooving, which unites ECDM and laser micromachining to address these issues. Single and hybrid processing techniques are examined for their morphological characteristics, and the outcomes demonstrate that ECDM produced tubular protrusions at the microgrooves’ base.
Chapter 7 explains various laser-based hybridized shaping processes with their applicability for processing and shaping materials at the micron/ submicron level.
Chapter 8 discusses the mechanisms for material removal and process energy distribution in hybrid laser-assisted jet electrochemical micromachining.
Chapter 9 demonstrates the fabrication of microstructure with a high aspect ratio on brittle materials using ultrasonic vibration-assisted micro wire WEDM.
Chapter 10 reveals the influence of input factors, i.e., the concentration of electrolyte, voltage, the rotation speed on average Material Removal Rate (MRR), and average hole diameter, as well as the average machined depth on drilling on soda-lime glass.
Chapter 11 introduces a miniature electromagnetic induction type generator by combining the Micro Electromechanical Systems (MEMS) process, a microfabrication technology, and the multilayer ceramic technology for miniatured electronic components fabrication.
Chapter 12 provides a detailed analytical overview of various hybrid-micromachining process bibliometric surveys, classification and machining mechanisms, and the effective utilization of process parameters with
particular emphasis on the hybrid-micromachining (nano, macro and micro-level) domain.
Chapter 13 describes the basic ideas behind the Spark Assisted Chemical Engraving technique. Many processes, including electrochemical discharge-aided melting and vaporization, etching at high temperatures, differential thermal expansion of components, random thermal stress cycles, and thermo-mechanical shocks caused by expanding gases and electrolyte movement, which contribute to this micromachining mode, are discussed.
A fundamental overview of the processes in issue, equipment specifics, operating principles, relevant process parameters, and significant applications are all included in various chapters’ material. Appropriate references to ongoing and past research as it relates to the described methods are provided throughout. This book will give a thorough understanding of numerous advanced hybrid micromachining and microfabrication techniques, as well as their future directions, providing researchers and engineers who work in hybrid micromachining with a necessary orientation. It intends to be a research-focused reference book used by scholars of hybrid microfabrication and micromachining procedures and aims to aid engineers, scientists, and academics in the field. Among the other crucial elements of the laboratories and institutes, the systematic importance stands out and should stimulate and inspire other researchers to pursue new avenues of exploration into hybrid microfabrication and micromachining technologies. The editors thank Scrivener Publishing for this prospect and their great assistance.
The Editors
March 2023
Acknowledgement
The starting and completing this book is unquestionably owed to the support of a number of colleagues and authors for their consistent direction, helpful suggestions, ongoing association, support, encouragement, and invaluable advice at every stage of this book’s development, from the embryonic to the end stages. This book would not have advanced as smoothly toward completion without their helpful suggestions at the right moment. They are in fact owed by the editors for the important time they gave to this publication.
Without the significant intellectual contributions of scholars from all across the world, this work would not have been conceivable.
All of the individuals who helped with the book’s editing and evaluation are sincerely appreciated by the editors.
Words alone cannot adequately express the editors’ sincere gratitude to Martin Scrivener and the entire Scrivener Publishing team for maintaining their commitment and illuminating the proper course of action in order to complete this high level book.
The editors acknowledge the unending encouragement and support of their families and friends.
The editors would like to use this opportunity to express their gratitude to all of the readers and the hope that this book will continue to inspire and direct them in their future endeavours.
The Editors
1Overview of Hybrid Micromachining and Microfabrication Techniques
Sandip Kunar1,2*, Akhilesh Kumar Singh3, Devarapalli Raviteja1,2, Golam Kibria4, Prasenjit Chatterjee5, Asma Perveen6 and Norfazillah Talib7
1Department of Mechanical Engineering, Aditya Engineering College, Surampalem, India
2Jawaharlal Nehru Technological University Kakinada, Kakinada, East Godavari, India
3Department of Mechanical Engineering, Aditya College of Engineering, Surampalem, Andhra Pradesh, India
4Department of Mechanical Engineering, Aliah University, Kolkata, India
5Department of Mechanical Engineering, MCKV Institute of Engineering, Howrah, India
6Mechanical & Aerospace Engineering Department, School of Engineering & Digital Sciences, Nazarbayev University, Republic of Kazakhstan
7Department of Manufacturing Engineering, Faculty of Mechanical and Manufacturing Engineering, Universiti Tun Hussein Onn Malaysia, Batu Pahat, Johor, Malaysia
Abstract
Hybrid micromachining and microfabrication techniques utilize concurrent deed of two or more micromachining procedures with assistance of some vitality in removal of material to augment the advantages and diminish the prospective difficulties observed in specific material ejection methods. There are different instances, like compound processes, energy aided micromachining methods, thermally aided micromachining, pulse-aided micromachining, and combined hybrid micromachining processes. This study introduces a unique categorization and analyses of the previous and current exploration and functions of the hybrid micromachining and microfabrication procedures and emphasizing its influences on performance characteristics. Even though it is an enthusiastic research field in unconventional and significant micromachining and microfabrication methods subsequently, inadequate acquaintance about proficiencies in shape, sizes, and controlling mechanisms is still the most important restraint in the progress of these procedures. In the adjacent future, there is plenty of opportunity for hybrid micromachining and microfabrication processes in studying of material removal at microlevel, consequence of residue strains, and working environment.
Keywords: Hybrid, micromachining, microfabrication
1.1 Introduction
From the last decades, there has been an enhanced benefit in microfabrication and micromachining techniques that have gained the creativity of investigators and industrial engineers from manufacturing sectors, mainly aviation, biomedical, and automobile. Emerging micromachining and microfabrication techniques are evidently continuing advances in microlevel industries, metrology, and machines to accomplish the requirements associated with the characteristics of microfeature [1]. Hybrid techniques state the conception of high-quality characteristics with shapes and sizes varying in micro level for different materials. The prerequisite for microproduct reduction continues to create several methodological restraints on discrete precision machining procedures, which are not constantly achievable to independently create a microcomponent meeting prerequisite, i.e., accuracy, surface quality, and shape intricacy. Also, the micro level measurements influence the specific method on functional characteristics and limit the application of self-regulating machining procedure. For instance, production techniques such as lithography are the utmost prevalent micromachining and microfabrication approaches that are accomplished to create microfeatures. Though, the limited choice of substrate materials, higher investment, and inability is unable to produce complex structures and inevitable clean room surroundings limit the usage of MEMS methods in micromachining and microfabrication fields [2].
Due to challenging in microfabrication and micromachining area and restrictions of discrete machining methods, researchers are concentrated to emerging hybrid micromachining and microfabrication methods, in which two or more techniques are composed together for micromachining to improve the benefits of fundamental procedures, while at that time diminishing their adversative problems when they are functional independently. The performing qualities of a hybrid procedure are significantly distinct from those methods in terms of efficiency, machining quality, and precision [3].
Hybrid micromachining is described as the combination of two or more micromachining methods to eradicate material [4]. The functional characteristics of hybrid micromachining and microfabrication approaches are significantly diverse from those that are distinctive for the constituent procedures when accomplished distinctly [5]. The hybrid machining method is to signify the amalgamation of different machining techniques with dissimilar capability of material exclusion [6]. These techniques are the approaches in which material eradication is owing to instantaneous action of two or more micromachining or microfabrication techniques or perform with the assistance of some energy in which the performance of the method enhanced pointedly, or else which are incredible when the procedures are utilized independently.
This chapter efforts to categorize recent hybrid micromachining and microfabrication techniques into pertinent classification and elucidate several methods utilized by researchers. The aim of this chapter is to deliver an appraisal on the different investigation works stated in the field of hybrid micromachining and microfabrication techniques to realize the machining capability of hybrid methods. This chapter efforts to deal with different hybrid methods in micro domain.
1.2 Classification of Hybrid Micromachining and Microfabrication Techniques
The category of hybrid micromachining and microfabrication techniques is classified with the utilization of procedural capability and/or energy/ tools resources. Hybridization of microfabrication and micromachining methods is carried out with the following conditions:
Hybridization of different methods into a compound procedure in which material removal arises because of concurrent action of different methods.
With aiding of various energy resources in material elimination to enhance performance of primary micromachining method.
Utilization of specifically devised hybrid tool that can perform the hybrid micromachining operation at a same time.
In the first type, compound process comprises techniques in which two or more techniques are employed for concurrent action of material removal such that substantial modifications in process operation can be accomplished. For instance, in EDG method, effective material removal occurs because of electro-discharge and grinding action compared to electro-discharge machining method. The second type, energy aided methods, the material removal is occurred owing to preliminary machining action, only certain amount of energy is utilized to enhance machining performances. For instance, in laser aided milling, the laser initially warms the material for removal, improving the material elimination capability of the milling approach. By the laser source for preheating substrate, the advanced materials are machined effortlessly. The third type utilizes a specific hybrid tool that performs single-time machining for different surfaces.
1.2.1 Compound Processes
Microfabrication and micromachining of microparts can be accomplished with distinct advantages with the assistance of chemical and electro-physical procedures as there is no explicit contact between the tool and substrate between these procedures. Combining these methods to create hybrid technique, further advances in unique benefits over specific method because of their less advantages [2]. In compound methods, there is instantaneous action of two or more machining techniques that completely entail in material removal action. Significant research outcomes are stated in these methods combining various techniques through various methods; some approaches are described.
In electro discharge micromachining (EDM), discharge energy considerably influences the machining quality. The surface finish reduces with greater voltage and current. The heating effect creates microdefects, residual stresses, etc. in EDM. To avoid these problems, innumerable studies are conveyed in hybrid electro-discharge micromachining since last decades. In compound hybrid micromachining processes, EDM is hybridized with other techniques, i.e., abrasive electro-discharge grinding (AEDG), electro discharge grinding (EDG), etc.
EDG confiscates from advanced materials by quick sparking phenomena between substrate and revolving tool that are divided by the dielectric fluid. This process utilizes a revolving tool, resulting in improved flushing proficiency of the method. Consequently, the material is efficiently removed from disparity and the unwanted materials are not stored in the machining space, whereas the accumulation of debris is a key difficulty with undesirable impact on functioning of the method in EDM. Several investigators are reported to find the significant parameters that influence the performances of the EDG method. Material removal and surface integrity can be enhanced by suitable input factors. To acquire greater material removal, greater machining current and higher duty cycle with positive polarity of electrode are utilized [7]. Researchers are concentrated for machining of delicate materials using EDG because no mechanical forces are applied through performance time, and it provides better machining than EDM because of the rotary wheel [8].
AEDG is a procedure in which the combined impact of grinding method and EDM is applied to improve the machining characteristics [9]. In this process, the grinding wheel is used instead of metallic or graphite electrode. Therefore, mechanical abrasion and discharge erosion take place for material removal. It is also known as electro-discharge abrasive grinding (EDAG) in various research papers. This procedure is suitable for machining engineering ceramics, and metal composites. Minimum surface roughness values are compared using three kinds of machining, i.e., electro-erosion grinding, hybrid grinding (AEDG), and traditional grinding [10]. The surface textures are associated with traditional grinding, and it is observed that irregular peaks are more in micro level in AEDG than traditional grinding method.
ECDM is a hybrid micromachining technique, where material ejection takes place through electrical discharges and electrolysis. This method is mostly used for microfabrication and micromachining of fragile materials such as quartz, refractory bricks, etc. [11]. The material removal is as much as 4 to 45 times than EDM and ECM. The combined form of this method is utilized for hole drilling, which is known as 3D micro structuring [12–15]. This method is specifically efficient for machining of HSTR alloys. This method is applied as microgrinding to improve the quality of coarse surface on glass material [16]. The procedure enhances the surface quality of ECDM structures and decreases the total structuring time of hybrid procedure compared to other traditional grinding procedure.
ECDG is a hybrid procedure of EDG and ECM, which merges the electrolysis, electro-discharge erosion and mechanical abrasion of the grinding procedure. Excess material is eliminated from the substrate by the electrolysis, the mechanical action of abrasives, and the erosion because of the spark phenomena. It is applied for conductive material’s machining. This method can grind hard and brittle materials for greater harder materials. The surface quality is achieved up to 0.13 to 0.75 µm, and the dimensional precision is obtained up to 0.0013 mm [17]. The grinding aided ECDM is used for finishing of metal matrix composites and achieved the surface roughness up to 10 times lower compared to that of the workpiece machined exclusive of grinding assistance [18].
1.2.2 Methods Aided by Various Energy Sources
(i) Thermally aided machining
The advanced materials have extensive uses in different areas, i.e., biomedical, aviation, etc. and their necessity is expanding; however, they are very tricky to process because of their properties like higher strength and lower thermal conductivity. Generation of précised 3D structures is carried out by micromilling and micromachining. The machining force at the microlevel is much greater compared to the macro-level, which creates micromachining of advanced materials [19]. The reduced surface finish of substrate and failure of the tool are occurred due to higher cutting force. Thermally aided micromachining assists for generating the high-aspect-ratio and intricate 3D microfeatures in different advanced materials. This assisted method uses exterior thermal resources to improve the temperature of the machining area for assisting the machining of material as decreases the residual stress of materials with higher heat. This method lowers the powered processing energy on the tool. The heat resources are pertinent for thermal assisted machining, which have the subsequent features: (i) higher thermal energy for quick heating of the material; (ii) easy controlling of the heated areas; and (iii) satisfactory cost of traditional machines. Until now, plasma [20, 21], induction coils [22, 23] and laser [24–36] are employed. However, the characteristics, i.e., higher heating intensity and controlling of heat resource become laser more favourite for thermally assisted machining.
Laser-aided machining is a prominent procedure that affects the rapid heating ability of laser with concentrated beam, challenging to machining by mechanical machining method. It is extremely concerned as stated by the progress of elevated power laser and improved in its pertinency. Laser is utilized for aiding grinding, electrochemical machining, and electro discharge machining processes to enhance their functioning. The material removal and laser heating occur concurrently in laser-assisted turning. This method is applied in various types of numerous diverse materials. It has demonstrated the effective way in lowering tool wear and forces when utilized to machine the advanced materials, i.e., titanium alloys, silicon nitride, Inconel, etc. Most of these findings are performed by Nd:YAG laser and CO2 lasers. Most of these research explore that laser assisted turning procedure helps for reducing the cutting forces, boosting the tool life and surface quality. In laser-aided milling method, the combination of milling machine and laser is occurred in which the tool is revolving. This occurrence of rotating tool is a problematic task. This method utilizes lower laser power to heat up the material, which is eliminated by the tool instantly behind it. This method is carried out utilizing microball end-milling tool on tool steel and demonstrated higher machining precision, and lower surface roughness. The surface finish improves as the cutting speed rises owing to the presence of laser heating. Improvement of thermal assisted milling method is safer, reliable, and accessible for engineering applications.
(ii) Media-aided machining
In this method, mechanical and heating characteristics of higher pressurized jet of emulsion and water are focused into the machining zone to enhance traditional machining of difficult materials for aerospace and defence applications. The pressurized liquid can offer advantages such as effective chip instability and decrease in machining forces, particularly in advanced materials. It can also enhance the lubricating characteristics and decrease heat responses on the cutting tools [37]. The turning assisted method is carried out with pressurized coolant for machining operation and surface finishing investigation is conducted on steel, Inconel 718, etc. [38]. The utilization of coolant with this method is responsible for hydraulic pressure between the chip and the rake face of tool, lowering the cutting forces and chip size and reducing tool erosion. More understandings into the effect of contact length, and surface finish in jet-aided turning of Inconel 718 are introduced. The machining capability of Inconel 718 is experimentally investigated in traditional and alternative higher pressurized cooling conditions [39]. The experimental outcomes demonstrate that the tool erosion and cutting forces significantly reduce with the supply of pressurized coolant to the machining zone. Cryogenic machining is utilized to affect the performance and is applied to reduce the machining temperature and improve the chemical constancy of the cutting tool and workpiece and is anticipated to enhance the performance capability of advanced materials [40–43].
(iii) Vibration-aided machining
This method is employed to different techniques from facing to grinding. These combined method performs precision machining with tool vibration and small amplitude. Here, the tool tip is moved with slight reciprocating motion. The tool can intermittently drop contact with the chip for proper sequences of frequency and cutting velocity. As a result, machining forces are lowered, and tiny chips are produced. This advances to enhance the surface quality, accuracy and burr free compared to traditional machining [44]. The constant flow of debris particles assists the stable performance in micro-EDM because of the application of tubular type substrate. However, a revolving spindle is not utilized in the creation of quadrilateral holes [45]. Many researchers have concentrated on ultrasonically aided micro-EDM to explore the influences of frequency on accuracy, machining rate, and so on [46]. The utilization of quivering unit is mostly used to improve dielectric movement, subsequent in efficient elimination of metal from craters [47–49], succeeding in lowest micro-racks and modifications of microstructure on substrate at greater material removal [50]. The vibration assisted workpiece has a substantial outcome on the machined characteristics of micro-EDM technique [51]. This method is more prominent for higher depth drilling on tungsten carbide [52]. The vibration assisted workpiece suggestively improves material removal, geometric accuracy, surface quality, and lower tool wear. Ultrasonic vibration-aided grinding is also known as rotary ultrasonic machining (RUM), is applied to investigate the machining capability of titanium [53], steels [54], etc. and most findings are stated that enhanced surface finish and better tool life are achieved at greater pulsation frequencies and smaller feed rates.
(iv) Pulse-assisted machining
Pulse-assisted electrochemical machining [55–57] offers an inexpensive and efficient technique for machining of advanced materials to generate intricate profiles, i.e., micro cavities, die, molds, etc. PECM improves the precision and machined quality because of a pulsed voltage with greater current density compared to electrochemical machining.
(v) Electromagnetic-aided machining
Many investigators are concentrated their attempts on magnetic force applications to support the production method presently and explored the advantageous consequences of magnetic force support in material removal. The viability and consistency of the magnetic media for machining are studied. This media is employed in different areas of surface polishing. The magnetic abrasive polishing method is applied to smooth the machined surface of steel [58]. Enhanced characteristic of EDM-machined surface is followed because of magnetic abrasive polishing technique [59]. The magnetic field around the workpiece is applied to enhance the machining capability in the abrasive flow machining (AFM) method [60]. The use of magnetic field is responsible for enhancing debris flow in EDM [61]. The greater material removal is achieved due to improved debris exclusion from gap in aid of magnetic fields [62, 63].
1.2.3 Processing Using a Hybrid Tool
A hybrid tool is used for machining of two or more planner surfaces. The tools of inconsistent type, multifunctional tools and tools of consistent type are distinguished for hybrid micromachining. These hybrid tools are more intricate and costly than traditional tools and may only be suggested for heavy production [64]. These tools of incompatible type comprise different comprehensive tools. They have excellent machining capability since they significantly improve the efficiency. Consistent tools are created by sequence of different cutting tools of several types. They are generally compound tools, but one-piece production is feasible. These hybrid methods accomplish two distinct types of cutting, deformation, and machining in different classifications.
1.3 Challenges in Hybrid Micromachining
Requirements for improvement of better instruments for ability of machining of précised intricate parts:
Hybrid micromachining techniques are evidently expanding for production of complicated 3D microparts. The development of precision instrument is very significant to gather requirements.
The microtool with précised movement with slight vibration will generate the precise microproducts.
Précised controlling of machining factors is important since little variation will affect the machining performance.
Improvement of accurate actuators and positioning mechanism
Actuators with high precision are incredibly significant. Efficient evaluation, design techniques and modelling for positioning and accurate high-speed actuators should be studied.
The capability of Piezoelectric actuators for précised positioning and their design is studied. Moreover, study of thermal influences on accuracy is important.
Advancement of receptive controller to meet higher functioning is crucial. Precision operation is reliable for producing precise surfaces.
Advancement of multi-functional tool for meeting micromachining requirements and improving research resources
While generating intricate parts, consumers incessantly require higher accuracy with enhanced feature. To gather these requirements, multi-operational tooling at decreased investment is necessary.
Controlling of microtools and microcomponents are complicated and required resources are supplied on machine tool.
On-machine production of electrode for hybrid electro discharge machining processes
In this method, managing of micro tools is a challenging task because of their possibility of twisting during assignments.
Moreover, precision of performance characteristics is influenced owing to higher tool wear in EDM.
Advancement of multi-operational CAD tool supporting computer-aided hybrid micromachining processes
CAD and CAM software enabling production through hybrid micromachining and microfabrication processes are significant.
For production of intricate parts, a particular CAD/CAM method is required for creating tool path and associated machining activity.
1.4 Conclusions
Hybrid micromachining and microfabrication is one of the dynamic research areas in production of microcomponents. This manuscript demonstrates a unique categorization of hybrid methods and evaluations of literature review, specifically, hybrid approaches, energy-aided methods, and procedures utilizing a hybrid tool. In micro level, hybrid methods are developing as crucial techniques. This methods demonstrate open new path of research for improving method abilities, diminishing their limitations, and spreading functional areas. The main limitations in the progress of hybrid schemes are inadequate acquaintance about compatibilities in sizes, and employing strategies associated to manufacturing products. Additionally, the essential acquaintance will affect the product superiority of different materials is still inadequate, and there is sufficient possibility in studying concerns in material removal at microlevel, and consequence of residual strains in the future.
1.5 Future Research Opportunities
Hybrid micromachining and microfabrication techniques require several types of energy, concurrently which are affected at the same fabrication area. Fundamental issues of material elimination capability and the mechanism related with hybrid system are one of the upcoming research purposes. Additional forthcoming research opportunity is simulation and modeling of hybrid micromachining and microfabrication procedures. Simulation of such procedures is explored with dissimilar approaches, i.e., molecular simulation, multiscale modeling, etc. Simulation and modeling support improved fundamental aspects of the hybrid procedures. There is prerequisite of ultraprecision machines that keeps high stiffness, control mechanisms, accurate feed drives, and are furnished to recompense for dynamic and static aligning faults. The accuracy of these techniques is improved further with diminished holding and rearrangement of tool faults.
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