Micro Electromechanical Systems (MEMS) E-Book
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- Herausgeber: John Wiley & Sons
- Kategorie: Wissenschaft und neue Technologien
- Serie: IEEE Press Series on Sensors
- Sprache: Englisch
Practical lab manual on the stepwise description of the experimental procedures of micro electromechanical systems (MEMS) devices
Micro Electromechanical Systems (MEMS) is a highly practical lab manual on the relevant experimental procedures of MEMS devices, covering technical aspects including simulations and modeling, practical steps involved in fabrication, thorough characterizations of developed MEMS sensors, and leveraging these sensors in real-time targeted applications.
The book provides in-depth coverage of multi-physics modeling for various sensors, as well as fabrication methodologies for photolithography, soft lithography, 3D printing, and laser processing-based experimental details for the realization of MEMS devices. It also covers characterization techniques from morphological to compositional, and applications of MEMS devices in contemporary fields such as microfluidics, wearables, and energy harvesters. The text also includes a foundational introduction to the subject.
The book covers additional topics such as:
- Basic fluid flow and heat transfer in microfabrication, Y and T channel mixing, and simulation processes for Droplet generation
- Simulations based on cyclic voltammetry and electrochemical impedance spectroscopy, screen and ink-jet printing, laser-induced graphene, reduced graphene oxide, and 3D printing
- X-ray diffraction, scanning electron microscopy, optical microscopy, Raman spectroscopy, energy dispersive spectroscopy, and Fourier Transform Infrared (FTIR) Spectroscopy
- Experimental stepwise details to enable students to perform the experiments in the practical laboratory and future outlooks on the direction of the field
A practical guidebook on the subject, Micro Electromechanical Systems (MEMS) is a must-have resource for students, academicians, and lab technicians seeking to conduct experiments in real-time.
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Seitenzahl: 242
Veröffentlichungsjahr: 2025
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Table of Contents
Cover
Table of Contents
Series Page
Title Page
Copyright Page
About the Editor
List of Contributors
Preface
About the Companion Website
1 Multiphysics Simulations on the Effect of Fluidic Concentration Profiles Over Y‐Channel andT‐Channel Designs
1.1 Introduction
1.2 Real‐Time Applications of This Study
1.3 Simulation Section
1.4 Results and Discussions
1.5 Conclusion
References
2 Droplet Generation in T‐Junction Microchannel Using Multiphysics Software
2.1 Introduction
2.2 Simulation Section
2.3 Result and Discussion
2.4 Conclusion
References
3 Cleanroom‐Assisted and Cleanroom‐Free Photolithography
3.1 Introduction
3.2 Photolithography Basics, Classification and Applications
3.3 Experimental Section on Designing and Development of Features Using Photolithography
3.4 Conclusion
References
4 Additive Manufacturing (3D Printing)
4.1 Stereolithography (SLA) Printing of Y‐Channeled Microfluidic Chip
4.2 Fused Deposition Modeling (FDM): Fabrication of Single Electrode Electrochemiluminescence Device
References
5 Laser Processing
5.1 CO
2
Laser for Electrochemical Sensor Fabrication
5.2 One‐Step Production of Reduced Graphene Oxide from Paper via 450 nm Laser Ablations
5.3 Conclusion
References
6 Soft Lithography: DLW‐Based Microfluidic Device Fabrication
6.1 Introduction
6.2 Designing Section
6.3 Conclusion
References
7 Electrode Fabrication Techniques
7.1 Inkjet Printing Technique: Electrode Fabrication for Advanced Applications
7.2 Screen Printing Technique for Electrochemical Sensor Fabrication
7.3 Physical Vapor Deposition (PVD) Technique for Electrode Fabrication
7.4 Conclusion
References
8 Morphological Characterization
8.1 Morphological Studies with Different Techniques
8.2 Scanning Electron Microscopy
8.3 Steps Involved in the Scanning Electron Microscope Characterization
8.4 X‐Ray Diffraction (XRD)
8.5 Optical LED Microscope
8.6 Contact Angle
References
9 Spectroscopic Characterization
9.1 Introduction
9.2 Ultraviolet‐Visible (UV‐Vis) Spectrophotometers
9.3 X‐Ray Photoelectron Spectroscopy (XPS)
9.4 Raman Spectroscopy
9.5 Fourier Transform Infrared (FTIR) Spectroscopy
References
10 Microfluidic Devices
10.1 Electrochemical Detection of Bacteria, Biomarkers, Biochemical, and Environmental Pollutants
10.2 Microfluidics Integrated Electrochemiluminescence System for Hydrogen Peroxide Detection
10.3 Development of Microfluidic Chip for Colorimetric Analysis
10.4 Development of Disposable and Eco‐Friendly μPADs as Chemiluminescence Substrates
10.5 Microfluidic Devices for Polymerase Chain Reaction (PCR)
References
11 Wearable Devices
11.1 Application of Laser‐Induced Graphene in Breath Analysis
11.2 Wearable Microfluidic Device for Nucleic Acid Amplification
11.3 Wearable Patch Biofuel Cell
References
12 Energy Devices
12.1 Introduction
12.2 Enzymatic Biofuel Cells and Microbial Fuel Cells
12.3 Microbial Fuel Cells (MFCs)
12.4 Electrochemical Characterization of Supercapacitor Energy Devices
References
13 Conclusion and Future Outlook
Index
IEEE Press Series on Sensors
End User License Agreement
List of Tables
Chapter 1
Table 1.1 Y‐ and T‐channel simulations with a varying flow rate of Inlet 2 ...
Chapter 2
Table 2.1 Variable process definitions.
Chapter 3
Table 3.1 Classification of different classes of clean room.
Table 3.2 Comparative analysis between both approaches of photolithography....
Chapter 9
Table 9.1 IR regions and respective spectra.
Table 9.2 Functional groups and respective frequency ranges.
List of Illustrations
Chapter 1
Figure 1.1 CAD images of Y and T‐shaped channels (All dimensions are in mm)....
Chapter 2
Figure 2.1 T‐junction microfluidic channel.
Figure 2.2 Model and geometry definition (a) T‐junction microfluidic channel...
Figure 2.3 Output result for the T‐junction droplet breakout (a) Volume frac...
Chapter 3
Figure 3.1 A schematic showing the difference between the positive and negat...
Figure 3.2 An illustration of step‐by‐step procedures followed to develop a ...
Chapter 4
Figure 4.1 CAD process to develop a Y‐channeled microfluidic chip: (a) line ...
Figure 4.2 Slicing operations over the Y‐channeled microfluidic chip using t...
Figure 4.3 The final SLA printed Y‐channeled microfluidic chip leveraged for...
Figure 4.4 (a) Real picture of 3D Printed MSEC held by universal support,...
Figure 4.5 Step‐by‐step process to fabricate electrodes using 3D printer.
Chapter 5
Figure 5.1 (a) Fabrication procedure of glucose monitoring LIG sensor,(b...
Figure 5.2 Step‐by‐step process to fabricate electrodes using laser‐induced ...
Figure 5.3 Design of a three‐electrode system (all dimensions are in mm).
Figure 5.4 Gcode conversion via GUI of Voxelizer software, (a) File import a...
Figure 5.5 Gcode conversion via GUI of Voxelizer software, (a) gcode convers...
Figure 5.6 Production of conductive rGO patterns via blue diode 450 nm laser...
Chapter 6
Figure 6.1 Step‐by‐step process involved in creating micro patterns with a D...
Figure 6.2 Procedure to prepare a PDMS mold by mixing PDMS base and curing a...
Figure 6.3 Fabrication of Y‐channel microfluidic device.
Chapter 7
Figure 7.1 CAD model to develop a microelectrode system, creating (a) a 25 m...
Figure 7.2 (a) Import the DXF file to convert it into Gerber format using DI...
Figure 7.3 (a) Glass slide as substrate, (b) clamp the glass slides on the p...
Figure 7.4 (a) schematic for detecting plant biomarkers using screen printed...
Figure 7.5 Step‐by‐step process to fabricate electrodes using screen printin...
Figure 7.6 The schematic of the basic setup used in the PVD.
Figure 7.7 The SS masks, the substrate arrangement, and the fabricated gold ...
Chapter 8
Figure 8.1 Steps involved in SEM characterization.
Figure 8.2 SEM image of the sample with a resolution of 10 and 500 μm.
Figure 8.3 The schematic diagram of brag's law.
Figure 8.4 The schematic operational diagram of XRD.
Figure 8.5 Setup for the X‐ray diffraction.
Figure 8.6 The sample preparation on the sample holder.
Figure 8.7 (a) Design of microchannel; (b) Developed master on glass slides ...
Figure 8.8 Optical Leica DM 2000 LED microscope.
Figure 8.9 Contact angle measurement with its surface wetting.
Figure 8.10 Setup of contact angle measurement.
Figure 8.11 Computer software for dispensing/filling the droplet‐based syrin...
Figure 8.12 Obtained data of the contact angle measured for the substrate of...
Chapter 9
Figure 9.1 Device operation flowchart.
Figure 9.2 UV‐Vis spectroscopy of the laser‐induced reduced graphene oxide (...
Figure 9.3 The schematic view of the photoelectron spectrometer.
Figure 9.4 XPS analysis graphs for the Co‐Co
3
O
4
‐rGO, including survey spectr...
Figure 9.5 Schematic to show the arrangement of the sample on a glass slide ...
Figure 9.6 Raman spectra for the formation of rGO [2]/with permission of IOP...
Figure 9.7 Brief overview of FTIR spectroscopy.
Figure 9.8 FTIR spectra of polyimide films.
Chapter 10
Figure 10.1 Working principle of an electrochemical sensor.
Figure 10.2 Stepwise fabrication process to develop an electro‐microfluidic ...
Figure 10.3 Electrochemical response from cyclic voltammetry study for bacterial gro...
Figure 10.4 (a) A microfluidic‐based device developed for lactate detection ...
Figure 10.5 Schematic of fabricated three‐electrode system (a) LIrGO three‐e...
Figure 10.6 Fabrication of LIG‐based electrochemical sensor for detecting (a...
Figure 10.7 Types of electrode configurations in the ECL process.
Figure 10.8 Visual image of the emitted ECL signal over a bipolar ECL electr...
Figure 10.9 Illustrative diagram of reduction in the intensity (dark blue to...
Figure 10.10 A zig‐zag design to develop a photoresist using a direct laser ...
Figure 10.11 (a) UV exposed photoresist coated over a glass slide (b) post‐d...
Figure 10.12 Measuring the dimensions of the developed photoresist at (a) st...
Figure 10.13 Step‐by‐step bonding of glass and PDMS microchip to develop a m...
Figure 10.14 Design of hydrophobic barrier for fluidic flow (all dimensions ...
Figure 10.15 Overview of process steps to be followed in the slicing tool.
Figure 10.16 3D printed hydrophobic barriers on paper. The traces are of PCL...
Figure 10.17 Real‐time validation of fluid transport through the 3D printed ...
Figure 10.18 Schematic for the Microfluidic Channel. Dimensions may be selec...
Chapter 11
Figure 11.1 Laser ablation for sensor fabrication (a) attaching the polyamid...
Figure 11.2 Functionality of the sensor is explained (a) when exhaled air or...
Figure 11.3 Represents the fabrication of wearable microchamber. The soft li...
Figure 11.4 Represents the amplified product using Isothermal amplification,...
Figure 11.5 Wearable biofuel cell setup: (a) substrate grade 1 filter paper;...
Chapter 12
Figure 12.1 Fabrication methodology of the hydrogen fuel cell: (a) 3D printe...
Figure 12.2 (a) PET sheet: (b) adhesive tape over PET sheet; (c) carbon clot...
Figure 12.3 Fabrication steps of microbial fuel cell: (a) glass slide; (b) f...
Figure 12.4 Electrode fabrication process steps to form doped laser induced ...
Figure 12.5 Electrochemical analysis: (a)–(c) CV, (d)–(f) GCD analysis (g) E...
Guide
IEEE Press Series on Sensors
Cover Page
Table of Contents
Series Page
Title Page
Copyright Page
About the Editor
List of Contributors
Preface
About the Companion Website
Begin Reading
Index
WILEY END USER LICENSE AGREEMENT
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Hai Li
Behzad Razavi
James Duncan
James Lyke
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Joydeep Mitra
Diomidis Spinellis
Micro Electromechanical Systems (MEMS)
Practical Lab Manual
Edited by
Sanket Goel
BITS Pilani, Hyderabad Campus, Hyderabad, India
Copyright © 2025 by The Institute of Electrical and Electronics Engineers, Inc.All rights reserved.
Published by John Wiley & Sons, Inc., Hoboken, New Jersey.Published simultaneously in Canada.
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About the Editor
Sanket Goel is a professor with the Department of Electrical and Electronics Engineering at BITS Pilani, Hyderabad Campus. He previously headed the same department and R&D department at UPES, Dehradun. He is the principal investigator of MEMS, Microfluidics and Nanoelectronics (MMNE) Lab, which works toward realizing futuristic smart sensors and intelligent energy harvesters encompassing various multidisciplinary domains. Prof. Goel has published more than 350 scientific articles in various domains, including microfluidics, biosensors, nanoelectronics, fuel cells, smart sensors, MEMS, solar energy, wearable devices and cyber‐physical systems. He has 60+ patents (including 12 granted) to his credits, has delivered more than 110 invited talks and has supervised 50+ PhD students. Prof. Goel is also on the editorial board of numerous journals and has a multitude of accolades including Fulbright and JSPS fellowships. Currently, he is also the dean (Research and Innovation) at BITS Pilani and Distinguished Lecturer of IEEE Sensors Council. Prof. Goel is a co‐founder of three spin‐offs: Cleome Innovations, Pyrome Innovations, and Sensome Innovations.
List of Contributors
Himanshi AwasthiMEMS, Microfluidics andNanoelectronics (MMNE) LabDepartment of Electrical andElectronics EngineeringBirla Institute of Technology andScience (BITS) PilaniHyderabad CampusHyderabad, Telangana, India
Aniket BalapureMEMS, Microfluidics andNanoelectronics (MMNE) LabDepartment of Electrical andElectronics EngineeringBirla Institute of Technology andScience (BITS) PilaniHyderabad CampusHyderabad, Telangana, India
Manish BhaiyyaMEMS, Microfluidics andNanoelectronics (MMNE) LabDepartment of Electrical andElectronics EngineeringBirla Institute of Technology andScience (BITS) PilaniHyderabad CampusHyderabad, Telangana, India
K.S. DeepakMEMS, Microfluidics andNanoelectronics (MMNE) LabDepartment of Electrical andElectronics EngineeringBirla Institute of Technology andScience (BITS) Pilani, HyderabadCampus, Hyderabad, Telangana, IndiaDepartment of MechanicalEngineering, Birla Institute ofTechnology andScience (BITS) PilaniHyderabad Campus, Jawahar NagarTelangana, India
Satish Kumar DubeyMEMS, Microfluidics andNanoelectronics (MMNE) LabDepartment of Electrical andElectronics Engineering, BirlaInstitute of Technology and Science(BITS) Pilani, Hyderabad CampusHyderabad, Telangana, IndiaDepartment of MechanicalEngineering, Birla Institute ofTechnology and Science (BITS) PilaniHyderabad Campus, HyderabadTelangana, India
Sohan DudalaMEMS, Microfluidics andNanoelectronics (MMNE) Lab,Department of Electrical andElectronics Engineering, BirlaInstitute of Technology and Science(BITS), Pilani, Hyderabad CampusHyderabad, Telangana, India
Sonal FandeMEMS, Microfluidics andNanoelectronics (MMNE) LabDepartment of Electrical andElectronics EngineeringBirla Institute of Technology andScience (BITS) Pilani, HyderabadCampus, Hyderabad, Telangana, IndiaDepartment of Pharmacy, BirlaInstitute of Technology and Science(BITS) Pilani, Hyderabad CampusHyderabad, Telangana, India
Sanket GoelMEMS, Microfluidics andNanoelectronics (MMNE) Lab,Department of Electrical andElectronics Engineering, BirlaInstitute of Technology and Science(BITS), Pilani, Hyderabad CampusHyderabad, Telangana, India
Amreen KhairunnisaMEMS, Microfluidics andNanoelectronics (MMNE) LabDepartment of Electrical andElectronics Engineering, BirlaInstitute of Technology and Science(BITS) Pilani, Hyderabad CampusHyderabad, Telangana, India
Imran KhanMEMS, Microfluidics andNanoelectronics (MMNE) LabDepartment of Electrical andElectronics Engineering, BirlaInstitute of Technology and Science(BITS) Pilani, Hyderabad CampusHyderabad, Telangana, India
Abhishek KumarMEMS, Microfluidics andNanoelectronics (MMNE) Lab,Department of Electrical andElectronics Engineering, BirlaInstitute of Technology and Science(BITS) Pilani, Hyderabad CampusHyderabad, Telangana, India
Pavar Sai KumarMEMS, Microfluidics andNanoelectronics (MMNE) Lab,Department of Electrical andElectronics Engineering, BirlaInstitute of Technology and Science(BITS) Pilani, Hyderabad CampusHyderabad, Telangana, India
Sanjeet KumarMEMS, Microfluidics andNanoelectronics (MMNE) LabDepartment of Electrical andElectronics EngineeringBirla Institute of Technologyand Science (BITS) PilaniHyderabad CampusHyderabad, Telangana, IndiaDepartment of MechanicalEngineering, Birla Institute ofTechnology and Science (BITS) PilaniHyderabad Campus, Jawahar NagarTelangana, India
Sreerama Amrutha LahariMEMS, Microfluidics andNanoelectronics (MMNE) Lab,Department of Electrical andElectronics Engineering, BirlaInstitute of Technology and Science(BITS) Pilani, Hyderabad CampusHyderabad, Telangana, India
Yuvraj Maphrio MaoMEMS, Microfluidics andNanoelectronics (MMNE) LabDepartment of Electrical andElectronics Engineering, BirlaInstitute of Technology and Science(BITS) Pilani, Hyderabad CampusHyderabad, Telangana, India
Dhoni NagarajMEMS, Microfluidics andNanoelectronics (MMNE) LabDepartment of Electrical andElectronics Engineering, BirlaInstitute of Technology and Science(BITS) Pilani, Hyderabad CampusHyderabad, Telangana, IndiaDepartment of MechanicalEngineering, Birla Institute ofTechnology and Science (BITS) PilaniHyderabad Campus, Jawahar NagarTelangana, India
Parvathy NairMEMS, Microfluidics andNanoelectronics (MMNE) LabDepartment of Electrical andElectronics Engineering, BirlaInstitute of Technology and Science(BITS) Pilani, Hyderabad CampusHyderabad, Telangana, India
N. K. NishchithaMEMS, Microfluidics andNanoelectronics (MMNE) LabDepartment of Electrical andElectronics Engineering, BirlaInstitute of Technology and Science(BITS) Pilani, Hyderabad CampusHyderabad, Telangana, India
Abhishesh PalMEMS, Microfluidics andNanoelectronics (MMNE) Lab,Department of Electrical andElectronics Engineering, BirlaInstitute of Technology and Science(BITS), Pilani, Hyderabad CampusHyderabad, Telangana, IndiaDepartment of MechanicalEngineering, Birla Institute ofTechnology and Science (BITS) PilaniHyderabad Campus, HyderabadTelangana, India
R.N. PonnalaguMEMS, Microfluidics andNanoelectronics (MMNE) Lab,Department of Electrical andElectronics Engineering, BirlaInstitute of Technology and Science(BITS) Pilani, Hyderabad CampusHyderabad, Telangana, India
Ramya Priya PujariDepartment of MechanicalEngineering, Birla Institute ofTechnology and Science (BITS) PilaniHyderabad Campus, HyderabadTelangana, IndiaMEMS, Microfluidics andNanoelectronics (MMNE) Lab,Department of Electrical andElectronics Engineering, BirlaInstitute of Technology and Science(BITS) Pilani, Hyderabad CampusHyderabad, Telangana, India
K. RamyaMEMS, Microfluidics andNanoelectronics (MMNE) LabDepartment of Electrical andElectronics EngineeringBirla Institute of Technologyand Science (BITS) PilaniHyderabad CampusHyderabad, Telangana, India
S. VanmathiMEMS, Microfluidics andNanoelectronics (MMNE) Lab,Department of Electrical andElectronics Engineering, BirlaInstitute of Technology and Science(BITS) Pilani, Hyderabad CampusHyderabad, Telangana, India
Preface
Emerging technologies assist in effortlessly identifying and addressing crucial scientific challenges in multiple fields. Of these, prominent contemporary areas include molecular diagnostics, cell biology, neuroscience, drug delivery, micro‐biotechnology, micro‐engineering (fabrication), sensors (wearable), and nano/micro‐material engineering, micro electro mechanical systems (MEMS) and microfluidics. MEMS technology excels in integrating microsensors within the system, using its submicron precision fabrication process. At the same time, microfluidics advances its potential in manipulating nano/micro‐volume fluids for automated testing through MEMS‐supported microchannel fabrications. Interestingly, MEMS technology encompasses a broad range of advanced microfabrication techniques, including photolithography, submicron additive manufacturing, printed electronics, nano/micron thin film depositions, hot embossing, e‐beam deposition, laser micromachining, laser‐assisted fabrications, micro‐electro discharge machining, and phase etching.
The potential of MEMS technologies is often limited due to their inaccessibility and high‐level technical language, which poses challenges for undergrads, postgrads, and entry‐level industrial researchers. To unlock the great potential and ensure that these researchers can make real‐time advances in MEMS products, the language must be made more understandable to a broader audience.
The book addresses this critical gap by compiling technical information into a lab manual designed for hands‐on practice and clear understanding. It provides expertise from research scholars to create a comprehensive library to facilitate knowledge transfer. The written content is supported by detailed instructional videos, offering the readers additional step‐by‐step guidance.
This book is classified into four major parts:
Microfluidic simulations (
Chapters 1
–
2
)
Advanced MEMS fabrication techniques (
Chapter 3
–
7
)
Material characterizations (
Chapters 8
–
9
)
Interesting applications (
Chapters 10
–
12
), followed by the outlook of the book and future scope (
Chapter 13
)
The complexity in experimental studies can be overcome by using computational tools, which help uncover and optimize unknown parameters for deeper insights. Chapter 1 offers a step‐by‐step guide on using the COMSOL simulation tool to understand concentration profiles in microfluidic channels (Y‐shaped and T‐shaped designs). The chapter begins with the fundamentals of CAD design for required microfluidic channel shapes, file conversions, and setting of computational parameters. The reader will explore how variations in flow rates of two fluids with unique concentrations affect mixing or concentration profiles. Moreover, this simulation allows the reader to create individual concentration profiles by changing the concentrations of fluids, flow parameters, and channel shapes at the end of this experiment.
Chapter 2 highlights the importance of microfluidic droplet generations, exploring the mechanism of generation and their applications in real‐time scenarios. The most used microfluidic shapes for droplet generations include T‐Junction, flow focusing, and co‐flow devices. This chapter focuses on the T‐Junction design (CAD modeling is discussed in Chapter 1 as well) and sets up the process parameters in computational tools to obtain numerical data for generating varying microdroplets. This will help the reader to simulate and generate microdroplets before conducting real‐time studies for multiple applications, including lab‐on‐chip experimentations, chemical synthesis, and cell analysis.
Further, this book provides practical insights into advanced microfabrication concepts using MEMS technologies. Chapter 3 emphasizes the critical role of the photolithography process and photoresist material for MEMS device development. It highlights the information on the classification of clean rooms and the comparison between both processes (i.e., clean room assisted and unassisted). It discusses dimensional accuracy, cost, training, automation, and suitability. Additionally, step‐by‐step information on these two processes is disclosed, i.e., via cleanroom assistance (i.e., conventional masked lithography) and without cleanroom assistance (i.e., using a laser unit) to develop microdevices. Moreover, the pictorial flowchart representations of both photolithography processes simplify complex concepts, enabling readers to come up with innovative ideas for develop microdevices.
Advances in additive manufacturing are documented in state‐of‐the‐art literature; however, translating this research into practical applications remains a challenge. Chapter 4 provides insights into two important 3D printing technologies (i.e., stereolithography (SLA) or dynamic light processing (DLP) and fused deposition modeling (FDM). This chapter introduces the concepts of 3D printing, types, their functioning, and related applications, all of which add hands‐on value to the reader. It begins with designing and developing a practical functioning Y‐shaped microfluidic device fabricated using SLA technology. All the steps are clearly explained, from the initial design of the chip to the slicing operations performed in 3D printing software until the final printed part is achieved. Further, the printed microfluidic device is validated through generating microdroplets, offering proof of concept.
In FDM‐based printing, the use of the thermoplastic filaments and the slice parameters are discussed in detail. As with other 3D printing methods, FDM‐based printing requires the initial CAD modeling, followed by the slicing tool used to load to the respective 3D printer. Each step is discussed in detail to help the reader easily reproduce the results. This chapter demonstrates the fabrication of an electrochemiluminescence (ECL) sensor to capture the luminescence signals. Interestingly, this process combines conductive PLA filament (for the sensor region) and standard PLA filament (for the supporting structure) to create the complete sensor. This process creates never‐before‐seen insights for the reader in making customized sensors using 3D printing technology.
Graphene is a revolutionary 2D material with exceptional electrophysical properties, making it a key component in developing sensitive sensors for multiple applications. Nevertheless, the tedious conventional production process limits its potential for real‐time applications. Chapter 5 introduces an alternative, ultrafast process for the one‐step production of graphene‐based sensors. The chapter also details the production of a one‐step graphene derivative (reduced graphene oxide (rGO)). The assistance of an advanced photothermal reduction approach via two different laser systems, CO2 (10.6 μm) and blue diode (450 nm) lasers, respectively, in producing graphene and rGO, is also elaborated. The process leverages commercially available substrates like polyimide (PI) and grade 1 filter paper to produce user‐defined conductive graphene and rGO patterns. Critical laser optimization and working parameters are demonstrated to help readers reproduce the process to obtain conductive graphenized material. In addition, detailed steps for designing and fabricating a three‐electrode sensor for electrochemical validations are provided. The chapter’s detailed guidance of this process encourages the reader to utilize this advanced laser‐assisted technology to develop one‐step user‐defined graphene traces for additional applications.
Microfluidics, a fascinating micro‐world field that delivers faster reaction responses with low consumption of reagent volumes, is first introduced in Chapter 1 (via simulations) and revisited in Chapter 3 to familiarize the reader with key concepts. Chapter 6 then provides the fundamentals for producing microfluidic devices using a soft lithography technique (i.e., using cleanroom free fabrication). This chapter also discusses the properties of flexible polymer polydimethylsiloxane (PDMS). Interestingly, a nonconventional direct laser writing (DLW) system is introduced to perform maskless lithography. It benefits the reader to develop microfluidic devices in the quickest possible technology at high resolutions. The chapter discusses photosensitive material coatings on glass slides (positive and negative resists), on which the mold formations are made via laser writings. The chapter details the development and etching mechanism, including suitable reagents needed to produce the desired pattern. Later, the concentration ratios of PDMS elastomers to their curing agents are discussed. Step‐by‐step guidance ensures proper spreading and curing of the mixture on the glass mold so that readers can avoid potential handling errors. Further, the stamped patterns onto the cured polymer are bonded to the glass slides through plasma treatment to make a functioning microfluidic device. This information encourages the reader to design their own microchannels and devices in multiple fields, from biomedical diagnostics to engineering.
One‐step production of graphene electrodes was introduced in Chapter 5, while Chapter 7 explores the next generation methods for electrode fabrication. The three prominent ways (automated inkjet printing, screen printing, and physical vapor deposition (PVD)) to fabricate the electrodes are discussed in this chapter. Automated inkjet printing highlights simplicity and avoids using photomask, stencil, and physical assistance in making electrodes. The design of three electrode systems in CAD and the introduction of the graphical user interface (GUI) of the inkjet printer is described in detail. The chapter also covers file formatting and optimizing the ink properties during printing to ensure ease of reproduction. Moreover, screen printing technology is introduced as an additional section for mass‐producing electrodes. The chapter discusses the importance of ink, its viscosity, and the simplified adoption process. In addition, to enhance the reader’s hands‐on experience, step‐by‐step instructions are provided to design, fabricate, and print three‐electrode systems on the flexible polymer (PI). In the search to provide high‐resolution sensor fabrication technology, the PVD approach is introduced to obtain nanometer thick conductive coatings. Gold is the precursor or source in this demonstration to develop the biosensor. A high‐voltage supply creates an electron beam to infuse on the gold source, while the fumes of the vaporized gold are directed to the region of interest to obtain nm coatings. All the deposition and precaution steps are noted in clear, straightforward language to enable the readers to replicate the process successfully.
Understanding the structural, morphological, and optical properties of the materials used to fabricate sensors is crucial for achieving the desired reaction outcomes. To address this concern, Chapters 8 and 9 introduce several hands‐on material characterization techniques. Chapter 8 provides comprehensive information on morphological characterization techniques, including high‐resolution scanning electron microscopy (SEM), optical microscopy (LED‐based), optical goniometer, and additionally structural characterization method, X‐ray diffraction (XRD). Detailed fundamental theoretical information on each technique and the experimentation steps are provided.
In SEM, secondary electrons emitted from the sample surface are directed to the detector to capture high‐resolution surface topography. The section begins by
