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Beschreibung

A wealth of information in one accessible book. Written by international experts from multidisciplinary fields, this in-depth exploration of oxide ultrathin films covers all aspects of these systems, starting with preparation and characterization, and going on to geometrical and electronic structure, as well as applications in current and future systems and devices. From the Contents: * Synthesis and Preparation of Oxide Ultrathin Films * Characterization Tools of Oxide Ultrathin Films * Ordered Oxide Nanostructures on Metal Surfaces * Unusual Properties of Oxides and Other Insulators in the Ultrathin Limit * Silica and High-K Dielectrics Thin Films in Microelectronics * Oxide Passive Films and Corrosion Protection * Oxide Films as Catalytic Materials and as Models of Real Catalysts * Oxide Films in Spintronics * Oxide Ultrathin Films in Solid Oxide Fuel Cells * Transparent Conducting and Chromogenic Oxide Films as Solar Energy Materials * Oxide Ultrathin Films in Sensor Applications * Ferroelectricity in Ultrathin Film Capacitors * Titania Thin Films in Biocompatible Materials and Medical Implants * Oxide Nanowires for New Chemical Sensor Devices

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Veröffentlichungsjahr: 2012

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Contents

Preface

List of Contributors

Chapter 1: Synthesis and Preparation of Oxide Ultrathin Films

1.1 Introduction

1.2 Basic Aspects of Fabrication

1.3 Physical Methods

1.4 Chemical Methods

1.5 Oxide Nanosheets and Buried Layers

1.6 Conclusions and Perspectives

Chapter 2: Characterization Tools of Ultrathin Oxide Films

2.1 Introduction

2.2 Structure Determination Techniques

2.3 Spectroscopic Techniques

2.4 Summary

Chapter 3: Ordered Oxide Nanostructures on Metal Surfaces

3.1 Introduction

3.2 Fabrication of Oxide Nanostructures

3.3 Novel Structure Concepts

3.4 Dimensionality Aspects: from Two- to One- to Zero-Dimensional Structures

3.5 Transition from Two- to Three-Dimensional Structures: Growth of Bulk Structures out of Interfacial Layers

3.6 Synopsis

Acknowledgment

Chapter 4: Unusual Properties of Oxides and Other Insulators in the Ultrathin Limit

4.1 Introduction

4.2 Evolution of Band Gap with Film Thickness

4.3 Electronic Transport through Oxide Ultrathin Films

4.4 Work Function Changes Induced by Oxide Films

4.5 Nanoporosity: Oxide Films as Molecular and Atomic Sieves

4.6 Flexibility of Oxide Thin Films and Polaronic Distortion

4.7 Conclusions

Acknowledgments

Chapter 5: Silica and High-k Dielectric Thin Films in Microelectronics

5.1 Introduction

5.2 Electrical Characterization of High-k Dielectrics on Silicon

5.3 Theoretical Modeling of Gate Dielectric Films

5.4 Models of the Structure and Properties of HfO2 Gate Dielectric Films

5.5 Polycrystalline Gate Oxide Films

5.6 Conclusions and Outlook

Acknowledgments

Chapter 6: Oxide Passive Films and Corrosion Protection

6.1 Introduction

6.2 Electrochemical Fundamentals of Passivation of Metals

6.3 Chemical Composition, Chemical States, and Thickness of Passive Films on Metals and Alloys

6.4 Two-Dimensional Oxide Passive Films on Metals

6.5 Growth and Nanostructure of Three-Dimensional Ultrathin Oxide Films

6.6 Corrosion Modeling by DFT

6.7 Conclusion

Chapter 7: Oxide Films as Catalytic Materials and Models of Real Catalysts

7.1 Introduction

7.2 Oxide Thin Films Grown as Supports

7.3 Systems to Model Real Catalysts

7.4 Ultrathin-Film Catalysts

7.5 Synopsis

Acknowledgments

Chapter 8: Oxide Films in Spintronics

8.1 Introduction

8.2 Historical Notes

8.3 Half-Metallic Manganites: the Case of LSMO

8.4 Electric Control of Magnetization in Oxide Heterostructures

8.5 Conclusions and Perspectives

Acknowledgments

Chapter 9: Oxide Ultrathin Films for Solid Oxide Fuel Cells

9.1 Overview of Solid Oxide Fuel Cell Technology

9.2 Preparation of Oxide Ion Conductor Thin Films

9.3 Nano Size Effects on Oxide Ion Conductor Films

9.4 Power Generating Property of SOFCs using LaGaO3 Thin Films

9.5 Development of μ-SOFCs

9.6 Concluding Remarks

Chapter 10: Transparent Conducting and Chromogenic Oxide Films as Solar Energy Materials

10.1 Introduction

10.2 Transparent Infrared Reflectors and Transparent Electrical Conductors

10.3 Thermochromics

10.4 Electrochromics

10.5 Summary and Concluding Remarks

Chapter 11: Oxide Ultrathin Films in Sensor Applications

11.1 Introduction

11.2 Sensor Applications

11.3 SnO2-Based Gas Sensors

11.4 Conclusion

Chapter 12: Ferroelectricity in Ultrathin-Film Capacitors

12.1 Introduction

12.2 Ferroelectricity: Basic Definitions

12.3 Theoretical Methods for the Study of Bulk Ferroelectric Materials

12.4 Modeling Ferroelectricity in Oxides

12.5 Theory of Ferroelectric Thin Films

12.6 Polarization Domains and Domain Walls

12.7 Artificially Layered Ferroelectrics

12.8 Conclusion and Perspectives

Acknowledgments

Chapter 13: Titania Thin Films in Biocompatible Metals and Medical Implants

13.1 The Advent of Titanium-Based Materials

13.2 Biologically Relevant Physicochemical Properties of Native Titania Thin Films

13.3 Strategies for Modification of the Surface Oxide Layer

13.4 Biological Surface Science

13.5 Biological Response to Surface Oxide Layers

13.6 Slow Release Capacity of Nanoporous Titanium Oxide Layers

13.7 Conclusion and Perspectives

Acknowledgments

Chapter 14: Oxide Nanowires for New Chemical Sensor Devices

14.1 Outline

14.2 Introduction

14.3 Synthesis

14.4 Integration

14.5 Metal Oxide Chemical Sensors

14.6 Conductometric Sensors

14.7 Optical Sensors

Index

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The Editors

Prof. Gianfranco Pacchioni

Università Milano Bicocca

Dipartimento di Scienza dei Materiali

via R. Cozzi 53

20125 Milano

Italy

Prof. Sergio Valeri

Università di Modena e Reggio Emilia

Dipartimento di Fisica

Via G. Campi 213 /A

41100 Modena

Italy

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Library of Congress Card No.: applied for

British Library Cataloguing-in-Publication Data

A catalogue record for this book is available from the British Library.

Bibliographic information published by the Deutsche Nationalbibliothek

The Deutsche Nationalbibliothek lists this publication in the Deutsche Nationalbibliografie; detailed bibliographic data are available on the Internet at <http://dnb.d-nb.de>.

© Wiley-VCH Verlag & Co. KGaA, Boschstr. 12, 69469 Weinheim, Germany

All rights reserved (including those of translation into other languages). No part of this book may be reproduced in any form – by photoprinting, microfilm, or any other means – nor transmitted or translated into a machine language without written permission from the publishers. Registered names, trademarks, etc. used in this book, even when not specifically marked as such, are not to be considered unprotected by law.

Cover Design Formgeber, Eppelheim

Print ISBN: 978-3-527-33016-4

ePDF ISBN:978-3-527-64019-5

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Preface

Oxide materials in bulk phase offer a great variety of behaviors. Most oxides are insulators or semiconductors, but there are also cases of metallic and even superconducting oxides; some are chemically inert and are therefore well suited for facing aggressive chemical environments, other are moderately reactive which makes them ideal for specific catalytic processes; oxides also exhibit a great variety of optical properties, from transparency to electrochromism; and so on. The richness of behaviors is due to the complex nature of the metal-oxygen bond, to the fact that oxides can exist in various compositions, and finally to the possibility to modify the properties by doping or by slightly changing the stoichiometry of the material. Recent advances in the growth under controlled conditions of ultrathin oxide films on a support (metals, semiconductors, other oxides) has paved the way towards nanostructures with special size, shape, composition and properties. By preparing oxides at the nanoscale, one can play around with a new parameter, the film thickness, to tune material properties on demand.

A precise definition of the concept of “ultrathin film” is not easy, as there is no simple way to identify the boundaries of this category from the broad area of thin films. It is clear that when the film thickness is below some characteristic length scale of the material, as the mean-free path of electrons, the spin diffusion length, the electron-hole mean recombination length, the magnetic domain wall widths, and so on we are in a special regime where new phenomena start to occur. However, from a purely practical point of view, we tend to classify as ultrathin films whose with thickness below 100 nm, a regime where structures and properties start to differ from the corresponding bulk counterparts. Some of the technologies discussed in this book already make use of such ultrathin films, while in other cases one is dealing with slightly thicker, hence more “traditional” structures, and the search for thinner layers is still at the research and development level.

Oxide ultrathin films and nanosheets are integral part of several advanced technologies. Some of these technologies are well established (e.g., oxide films in field-effect transistors or flash memories), and are used since decades. In other cases oxide ultrathin films are essential to confer a specific property to a material (e.g., biocompatibility of metal implants in medicine or protection of metals from corrosion by formation of passive layers); in other cases, it is only recently that the importance of oxide ultrathin films has been recognized (e.g., the formation of active oxide layers in oxidative catalysis by metals). Other systems and devices of new generation are especially designed to exploit the reduced thickness of oxide films in order to give rise to new phenomena or improved performances (e.g., tunneling magnetoresistance sensors, special coatings for energy saving, ferroelectric ultrathin film capacitors, solid oxide fuel cells).

The applications, the preparation and characterization methods are so diverse that often communities developing and using oxide ultrathin films are not communicating to each other. One motivation of this book is thus to bring together examples and contributions coming from fields as diverse as surface chemistry, magnetism, energy materials, biomaterials, solid state physics, catalysis, microelectronics, sensors, and so on, all related to the exploitation of the peculiar properties of ultrathin oxide films.

With this book we plan to give an overview of the present state of the art by addressing some fundamental aspects of the preparation and physico-chemical characterization of these systems, with particular attention to the new properties that they can exhibit. But aim of the book is also to illustrate direct applications and technologies where the use of ultrathin oxide films is either mature or is very promising in terms of potential outcomes.

There is little doubt that these systems are going to play an increasingly important role in the future. A deeper understanding of their nature, a better control of their properties, a perspective view of their potentialities are all aspects which are essential in order to foster research in this exciting field. This is also the main motivation of this book.

Gianfranco Pacchioni and Sergio Valeri

List of Contributors

Pablo Aguado-Puente

Departamento de Ciencias de la Tierra

y Fisica de la Materia Condensada

Universidad de Cantabria, Cantabria

Campus Internacional

Avda. de los Castros s/n

E-39005 Santander

Spain

Stefania Benedetti

S3 Istituto Nanoscienze CNR

Modena

Italy

Gennadi Bersuker

SEMATECH

Austin

TX 78741

USA

Riccardo Bertacco

Politecnico di Milano

LNESS, Dipartimento di Fisica

via Anzani 42

Como

20100

Italy

Elise Brunet

AIT Austrian Institute of Technology

GmbH

Health & Environment Department,

Nano Systems

Donau-City-Straße 1

1220

Vienna

Austria

Franco Ciccacci

Politecnico di Milano

LNESS, Dipartimento di Fisica

piazza L. da Vinci 32

20133

Milano

Italy

Elisabetta Comini

University of Brescia

Department of Chemistry and Physics

Via Valotti 9

25133

Brescia

Italy

Hans-Joachim Freund

Fritz-Haber-Institut der Max-Planck-Gesellschaft

Faradayweg 4-6

D-14195

Berlin

Germany

Philippe Ghosez

Physique Théorique des Matériaux

Université de Liège

Allée du 6 Août 17 (B5)

B-4000 Sart Tilman

Belgium

Livia Giordano

Università di Milano-Bicocca

Dipartimento di Scienza dei Materiali

via Cozzi 53

20125

Milano

Italy

Claes-Göran Granqvist

Uppsala University

Department of Engineering Sciences,

Ångström Laboratory

PO Box 534

SE-751 21

Uppsala

Sweden

David C. Grinter

University College London

London Centre for Nanotechnology and Department of Chemistry

WC1H 0AJ

UK

London

Tatsumi Ishihara

Kyushu University

Department of Applied Chemistry

Motooka 744

819-0395

Nishi-ku, Fukuoka

Japan

Javier Junquera

Departamento de Ciencias de la Tierra

y Fisica de la Materia Condensada

Universidad de Cantabria, Cantabria

Campus Internacional

Avda. de los Castros s/n

E-39005 Santander

Spain

Anton Köck

AIT Austrian Institute of Technology

GmbH

Health & Environment Department,

Nano Systems

Donau-City-Straße 1

1220

Vienna

Austria

Céline Lichtensteiger

DPMC - Université de Genève

24 Quai Ernest Ansermet

CH-1211 Genève 4

Switzerland

Philippe Marcus

Ecole Nationale Supérieure de Chimie

de Paris

Laboratoire de Physico-Chimie des

Surfaces, Chimie ParisTech – CNRS

(UMR 7045)

11 rue Pierre et Marie Curie

75005

Paris

France

Vincent Maurice

Ecole Nationale Supérieure de Chimie

de Paris

Laboratoire de Physico-Chimie des

Surfaces, Chimie ParisTech – CNRS

(UMR 7045)

11 rue Pierre et Marie Curie

75005

Paris

France

Keith McKenna

Tohoku University

WPI-Advanced Institute for Materials

Research

2-1-1, Katahira, Aoba-ku

980-8577

Sendai

Japan

and

University College London

Department of Physics and Astronomy

Gower Street

WC1E 6BT

London

UK

Giorgio Mutinati

AIT Austrian Institute of Technology

GmbH

Health & Environment Department,

Nano Systems

Donau-City-Straße 1

1220

Vienna

Austria

Antonio Nanci

Université de Montréal

Laboratory for the Study of Calcified

Tissues and Biomaterials

H3C 3J7

Montréal, QC

Canada

Falko P. Netzer

Karl-Franzens University Graz

Surface and Interface Physics

A-8010

Graz

Austria

Gianfranco Pacchioni

Università di Milano-Bicocca

Dipartimento di Scienza dei Materiali

via Cozzi 53

20125

Milano

Italy

Giorgio Sberveglieri

University of Brescia

Department of Chemistry and Physics

Via Valotti 9

25133

Brescia

Italy

Alexander Shluger

Tohoku University

WPI-Advanced Institute for Materials Research

2-1-1, Katahira, Aoba-ku

980-8577

Sendai

Japan

and

University College London

Department of Physics and Astronomy

Gower Street

WC1E 6BT

London

UK

Stephan Steinhauer

AIT Austrian Institute of Technology

GmbH

Health & Environment Department,

Nano Systems

Donau-City-Straße 1

1220

Vienna

Austria

Massimiliano Stengel

Institut de Ciènca de Materials de

Barcelona (ICMAB-CSIC)Campus UAB

E-08193 BellaterraSpain

Svetlozar Surnev

Karl-Franzens University Graz

Surface and Interface Physics

A-8010

Graz

Austria

Geoff Thornton

University College London

London Centre for Nanotechnology and Department of Chemistry

WC1H 0AJ

London

UK

Jean-Marc Triscone

DPMC - Université de Genève

24 Quai Ernest Ansermet

CH-1211 Genève 4

Switzerland

Sergio Valeri

Università di Modena e Reggio Emilia

Dipartimento di Fisica

Modena

Italy

and

S3 Istituto Nanoscienze CNR

Modena

Italy

Fabio Variola

University of Ottawa

Department of Mechanical Engineering

K1N 6N5

Ottawa, ON

Canada

Alberto Vomiero

CNR IDASC Sensor Laboratory

Via Valotti 9

25133

Brescia

Italy

Pavlo Zubko

DPMC - Université de Genève

24 Quai Ernest Ansermet

CH-1211 Genève 4

Switzerland

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