Group III-Nitride Semiconductor Optoelectronics - C. Jayant Praharaj - E-Book

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C. Jayant Praharaj

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Group III-Nitride Semiconductor Optoelectronics Discover a comprehensive exploration of the foundations and frontiers of the optoelectronics technology of group-III nitrides and their ternary alloys In Group III-Nitride Semiconductor Optoelectronics, expert engineer Dr. C. Jayant Praharaj delivers an insightful overview of the optoelectronic applications of group III-nitride semiconductors. The book covers all relevant aspects of optical emission and detection, including the challenges of optoelectronic integration and a detailed comparison with other material systems. The author discusses band structure and optical properties of III-nitride semiconductors, as well as the properties of their low-dimensional structures. He also describes different optoelectronic systems such as LEDs, lasers, photodetectors, and optoelectronic integrated circuits. Group III-Nitride Semiconductor Optoelectronics covers both the fundamentals of the field and the most cutting-edge discoveries. Chapters provide thorough connections between theory and experimental advances for optoelectronics and photonics. Readers will also benefit from: * A thorough introduction to the band structure and optical properties of group III-nitride semiconductors * Comprehensive explorations of growth and doping of group III-nitride devices and heterostructures * Practical discussions of the optical properties of low dimensional structures in group III-nitrides * In-depth examinations of lasers and light-emitting diodes, other light-emitting devices, photodetectors, photovoltaics, and optoelectronic integrated circuits * Concise treatments of the quantum optical properties of nitride semiconductor devices Perfect for researchers in electrical engineering, applied physics, and materials science, Group III-Nitride Semiconductor Optoelectronics is also a must-read resource for graduate students and industry practitioners in those fields seeking a state-of-the-art reference on the optoelectronics technology of group III-nitrides.

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Group III-Nitride Semiconductor Optoelectronics

C. Jayant Praharaj Band Photonics Materials CA, US

 

 

 

This edition first published 2024

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Contents

Cover

Title Page

Copyright Page

Preface

1 Introduction

2 Band Structure and Optical Properties of Group III-Nitride Semiconductors

Crystal Symmetry (Wurtzite and Cubic Phases)

Lattice Periodicity and Crystal Hamiltonian

Bloch’s Theorem and Nature of Electron States

Quantum Mechanical Properties Corresponding to Bloch States

Light–Matter Interaction in Semiconductors

Spontaneous and Piezoelectric Polarization

Phonon Spectrum

Scattering Mechanisms

Donors and Deep Acceptors

3 Growth and Doping of Group III-Nitride Devices

Major Epitaxial Growth Methods

In Situ and Implant Doping

Dislocations and Point Defects

Dopant-induced Defects

Substrates and Growth

Gallium Nitride Growth on Silicon Substrates

4 Optical Properties of Low-dimensional Structures in Group III Nitrides

Quantum Wells, Quantum Wires, and Quantum Dots

The k.p Method

Crystal Symmetry and Low-dimensional Structures

Alloy Disorder and Density Functional Theory Electronic Structure Calculation

Deviations from Charge Neutrality and Effect on Electronic Structure

Polarization Engineering Using Quaternaries and Complex Structures

Dislocations in Low-dimensional Structures and Carrier Dynamics

Disorder, Carrier Localization, and Effect on Recombination and Red Shifts

5 Light-emitting Diodes and Lasers

Blue, Green, and Ultraviolet (UV) LEDs

Light-emitting Diode Basic Operating Principles

Blue, Green, and UV Lasers

Blue, Green, and Device Laser Materials – Device Considerations

Nanowire microLEDs

LED Quantum Efficiencies and Laser Threshold Currents in Quantum Wires and Quantum Dots

Auger Recombination and Efficiency Droop in Group III-Nitride LEDs

Dislocations in Low-dimensional Structures and Carrier Dynamics

Disorder, Carrier Localization, and Effect on Recombination and Red Shifts

Staggered Quantum-well InGaN Laser Characteristics

Non-polar Plane Quantum-well InGaN LEDs and Lasers

Semi-polar Plane Quantum-well InGaN LEDs and Lasers

p-Type Ohmic Contacts and Efficiency of LEDs and Lasers

Vertical Cavity Surface Emitting Lasers

Distributed Feedback Lasers

Plasmonic Nanolasers

Indium Gallium Nitride LEDs and Lasers on Si Substrates

6 Inter Sub-band Devices

Quantum Cascade Lasers

Infrared Photodetectors

7 Photodetectors

Ultraviolet Photodetectors

Complex Dielectric Function

Basic Principle of Operation

Metal–Semiconductor–Metal (MSM) Photodetector

Solar-blind Group III-Nitride UV Photodetectors

p-i-n Photodiodes

Schottky Barrier Photodiodes

Heterogenous Photodiodes with Group III Nitrides and Transition Metal Dichalcogenides

Alloy Nitrides and Spectral Response

Photodetectors and Substrate Engineering

8 Photovoltaics and Energy Conversion Devices

Indium Gallium Nitride Material System for Solar Cells

Basic Solar Cell Physics – p-n Junction Solar Cells

Intermediate Band Solar Cells

Substrate Effects on InGaN Solar Cells

Ohmic Contact Effects in p-n and p-i-n InGaN Solar Cells

Plasmonically Enhanced Solar Cells

Solar Concentrating Photovoltaics

Tandem Solar Cells Using Indium Gallium Nitride

Semiconductor Photocatalysis Using InGaN

9 Quantum Photonic Properties of Nitride Semiconductor Devices

Non-classical Light from Group III-Nitride Heterostructures

Spontaneous and Piezoelectric Polarization Effects

Spectral Diffusion in Quantum Dots

Photon Linewidths

Optically Pumped Versus Electrically Pumped Quantum Emitters

Photon Detection Properties

10 Polaritons in Nitride Semiconductor Heterostructures

Strong Coupling between Excitons and Cavity Modes

Conditions for Strong Coupling

Energies of Polariton Modes

Characterization of Polariton Modes

Polaritonic Lasing versus Photonic Lasing

Exciton Binding Energies and Polaritonic Lasing

Spontaneous and Piezoelectric Polarization Effects

Optically Pumped versus Electrically Pumped Polariton Lasers

Inhomogeneous Broadening in Polaritonic Lasing

Polariton Lasing in Quantum Heterostructure Nanocavities

11 Plasmon-coupled Group III-Nitride Optoelectronic Devices

Coupling between Localized Surface Plasmons (LSPs) and Quantum Wells

LEDs and Lasers Based on LSPR Coupling

Biosensing Schemes Based on LSPR/QW Coupling

InGaN QW Substrates for Surface-enhanced Raman Scattering (SERS) Extended Hotspots

InGaN Nanorods Plus Metal NPs for Water Splitting Using SPR Effects

InGaN QDs Plus Metal NPs for Water Splitting Using SPR Effects

12 Photonic Integrated Circuits Using Group III-Nitride Semiconductors

Indium Gallium Nitride (InGaN)-based Monolithic Photonic Chips

Photonic Integrated Circuits with Plasmonic Components

Exploring Modulators Using Nitrides for Easier Integration

Combining Photonic and Electronic Components on the Same Chip

Monolithically Integrated Multi-color LED Display on a Single Chip

13 Conclusion

Index

List of Illustrations

CHAPTER 02

Figure 2.1 Wurtzite crystal structure...

Figure 2.2 E-k relations...

Figure 2.3 Bandgaps, effective masses...

Figure 2.4 Spontaneous polarization for...

Figure 2.5 Piezoelectric polarization for...

Figure 2.6 Phonon dispersion curves...

Figure 2.7 (top) Scattering rates...

Figure 2.8 Dipolar and quadrupolar...

Figure 2.9 The alloys have...

CHAPTER 03

Figure 3.1 Schematic of an...

Figure 3.2 Room temperature (RT...

Figure 3.3 (a) InGaN/GaN...

Figure 3.4 Normalized photoluminescence (PL...

Figure 3.5 Coalescing AlGaN nanowires...

Figure 3.6 Stranski–Krastanow...

Figure 3.7(a) Schematic of...

Figure 3.7(b) Typical photoluminescence...

Figure 3.8 Nitrogen-modulation epitaxy...

Figure 3.9 Water splitting vertical...

Figure 3.10 A typical MOCVD...

Figure 3.11 MOCVD growth-rate...

Figure 3.12 Boundary layer details...

Figure 3.13 Carbon concentration during...

Figure 3.14 Lattice mismatch and...

Figure 3.15 Electroluminescence of combined...

Figure 3.16 LED characteristics for...

Figure 3.17 Wurtzite crystal structure...

Figure 3.18 Typical non-polar...

Figure 3.19 Typical nanowires obtained...

CHAPTER 04

Figure 4.1 Conduction-band wave...

Figure 4.2 Conduction-band wave...

Figure 4.3 Conduction-band offset...

Figure 4.4 Modification of density...

Figure 4.5 Cathodoluminescence (CL) spectra...

Figure 4.6 Directions of spontaneous...

Figure 4.7 Reduced electron and...

Figure 4.8 Self-assembled In0...

Figure 4.9 High-resolution transmission...

Figure 4.10 Electron and hole...

Figure 4.11 HRTEM image of...

Figure 4.12 Level of alloy...

Figure 4.13 2DEG plasmon frequencies...

Figure 4.14 Lattice constant versus...

Figure 4.15 Polarization components for...

Figure 4.16 Band profiles of...

Figure 4.17 Optical gain spectra...

Figure 4.18 LED parameter improvements...

Figure 4.19 Strain fluctuations (top...

Figure 4.20 Non-polar and...

CHAPTER 05

Figure 5.1 InGaN UV LED...

Figure 5.2 Efficiency cliff in...

Figure 5.3 Different kinds of...

Figure 5.4 Quantum-well laser...

Figure 5.5 (a) Scanning electron...

Figure 5.6 Nanowire white LED...

Figure 5.7 InGaN/AlGaN nanowire...

Figure 5.8 Laser emission spectrum...

Figure 5.9 (a) Transmission electron...

Figure 5.10 Wavelength-tunable LED...

Figure 5.11 Various scattering and...

Figure 5.12 Schematic diagram of...

Figure 5.13 Band diagrams of...

Figure 5.14 Optical gain versus...

Figure 5.15 Peak gain versus...

Figure 5.16 Material peak gain...

Figure 5.17 Modulation parameters of...

Figure 5.18 Location of hole...

Figure 5.19 Power output improvement...

Figure 5.20 Photoluminescence of InGaN...

Figure 5.21 Typical structure of...

Figure 5.22 Narrow linewidth emission...

Figure 5.23 Surface plasmon-enhanced...

CHAPTER 06

Figure 6.1 A quantum cascade...

Figure 6.2 Structure and energy...

Figure 6.3 MITATT superlattice diode...

Figure 6.4 Nanodisks for infrared...

Figure 6.5 Variation of inter...

Figure 6.6 Inter sub-band...

Figure 6.7 Broadband quantum cascade...

CHAPTER 07

Figure 7.1 Real and imaginary...

Figure 7.2 Theoretical and experimental...

Figure 7.3 Exciton binding energies...

Figure 7.4 Photoresponse of a...

Figure 7.5 GaN photodetector and...

Figure 7.6 Pt-GaN plasmonic...

Figure 7.7 Schematic, charge density...

Figure 7.8 Impact ionization processes...

Figure 7.9 Experimental impact ionization...

Figure 7.10 Heterojunction InGaN/AlN...

CHAPTER 08

Figure 8.1 Nature of the...

Figure 8.2 Schematic of p...

Figure 8.3 The typical structure...

Figure 8.4 JV characteristics and...

Figure 8.5 JV characteristics of...

Figure 8.6 JV characteristics of...

Figure 8.7 First photon and...

Figure 8.8 Absorption enhancement and...

Figure 8.9 Short-circuit currents...

Figure 8.10 Typical tandem cell...

CHAPTER 09

Figure 9.1 The emission spectrum...

Figure 9.2 Coincidence counts as...

Figure 9.3 Exciton emission with...

Figure 9.4 Biexcitonic double-photon...

Figure 9.5 Temperature dependence of...

CHAPTER 10

Figure 10.1 Typical polariton splitting...

Figure 10.3 Polaritonic and photonic...

Figure 10.2 Typical device structure...

Figure 10.4 Intensity maps of...

CHAPTER 11

Figure 11.1 Bare nanorods (left...

Figure 11.2 Photoluminescence (PL) spectra...

Figure 11.3 (Top) PL intensity...

Figure 11.4 Increase in Raman...

Figure 11.5 Energy transfer mechanisms...

Figure 11.6 Photo-induced currents...

CHAPTER 12

Figure 12.1 Dry plus wet...

Figure 12.2 (Left) Laser facet...

Figure 12.3 InGaN nanowire diameter...

Guide

Cover

Title Page

Copyright Page

Table of Contents

Preface

Begin Reading

Index

End User License Agreement

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Preface

The field of group III-nitride optoelectronic devices is about three decades old. Pioneering efforts by S. Nakamura led to early demonstrations of blue light-emitting diodes and lasers. However, improvements in quantum efficiency, power efficiency, and threshold currents have driven a lot of new innovations spanning these decades. The major technological challenges for optoelectronic emitters in this material system comes in two varieties. The first is the existence of large spontaneous and piezoelectric polarizations and the resulting large built-in fields in quantum wells, quantum wires, and quantum dots. The second is the large acceptor ionization energies and low ionization ratios of acceptors that make getting good p-type layers for device optimization difficult.

The first of these challenges can be tackled using device tricks or by using different types of material optimizations like switching to non-polar or semi-polar growth planes. Each way of improving device performance comes with its pros and cons, and the best solutions may arise from a combination of material (e.g. growth, crystallographic) and device methods. This book tries to offer a perspective on these optimization methods while emphasizing the device aspects.

The InGaN (indium gallium nitride) alloy system spans the range of bandgaps from 0.7 eV to 3.43 eV, which makes it attractive for designing solar cells since they can absorb the entire solar spectrum efficiently, all of them being direct bandgap material. Suffice it to say that while the bandgap aspect is attractive, device design challenges and other challenges, like optimization of p-type layers, remain. Therefore, most reported experimental work on InGaN photovoltaics has reported modest efficiencies. Most of the serious experimental work on InGaN photovoltaics has happened in the last decade, and a decade is less than enough time to reach efficiencies to compete with or challenge existing photovoltaics. We hope that the chapter on photovoltaics (Chapter 8) serves as a good guide for future research to improve quantum efficiencies and power conversion efficiencies in InGaN solar cells.

This book tries to cover the effect of spontaneous and piezoelectric polarization on quantum wells, quantum wires, and quantum dots with a view to understand the overall effect on device performance. We also hope that the reader can get enough understanding of the device-related polarization phenomena to be able to do device optimization in this material system.

C. Jayant Praharaj

Sunnyvale, 2022

1 Introduction

The group III-Nitride semiconductors (InN [indium nitride], GaN [gallium nitride], and AlN [aluminum nitride]) have achieved a high degree of maturity over the last two or three decades, although specific areas of research still uncover new grounds. The bandgaps of these semiconductors in their wurtzite crystal structure are 0.7 eV for InN, 3.4 eV for GaN, and 6.2 eV for AlN. This means that alloying these semiconductors with one another achieves bandgaps that range from the infrared to the ultraviolet. Further, all three of these are direct bandgap semiconductors (the valence band maxima and conduction band minimum are at the same point in the Brillouin zone). This combination of a wide range of bandgaps and the direct nature of the bandgaps has tremendous implications for optoelectronic devices. The photon or light emission can have high efficiency over a large frequency range as a result. Also, the photon or light absorption can be relatively strong over a wide range of frequencies or wavelengths. The basic conversion factor for this is provided by the Planck relation of quantum mechanics:

where Eg is the bandgap, h is Planck’s constant and νg is the frequency of absorption or radiation corresponding to the bandgap. It must be kept in mind that frequencies and energies above the bandgap can potentially be emitted or absorbed. However, as explained in Chapter 2, statistical physics involving Fermi–Dirac distributions and density-of-state considerations often mean that a small range above the bandgap is involved in devices like emitters. Photovoltaic devices use absorption over a wide range starting from the bandgap energy.

Although we focus on optoelectronic devices in this book, it should be kept in mind, for perspective, that the group III-Nitride semiconductors have other wide applications like high-power, high-frequency microwave devices. In fact, a lot of the material aspects of group III-Nitride semiconductors were understood and improved upon during research efforts in both microwave devices and optoelectronic devices. High electron mobility transistors and heterojunction bipolar transistors are only some of the devices where high-power microwave operation is possible, for example, in ranges beyond the capability of the arsenides and phosphides. Furthermore, the group III nitrides can potentially be used in the terahertz range, although more research is required. A lot of the same fundamental factors influence physical properties. For example, the impact ionization coefficient involves collisions between charge carriers that excite an electron from the valence band to the conduction band in a three-particle setting, and the larger bandgap leads to lower impact ionization coefficients and larger breakdown voltages. This is the basis for the realization of high-power microwave operation. The same bandgap determines the lower cut-off energy for the absorption coefficient in some optoelectronic devices.

In Chapter 2, we discuss the basic physical properties of group III-Nitride semiconductors like bandgaps, effective masses, absorption coefficients, polarization, and a host of other properties. We focus mainly on bulk properties because they serve as a good point of departure for more advanced concepts discussed in this book. In Chapter 3, we discuss epitaxial growth of group III nitrides using molecular beam epitaxy and metal organic chemical vapor deposition. Since this is a book on device aspects, this chapter can cover only the basic aspects of these growth techniques, and the reader should refer to papers and books on crystal growth for a deeper perspective. Chapter 4 discusses the very important topic of how the properties are determined by confinement in the form of quantum wells, quantum wires, and quantum dots. It forms the basis of later chapters on light emitters, for example, because a vast majority of them use quantum wells, wires, and dots. Chapter 5 discusses light-emitting diodes and lasers built using group III-Nitride semiconductors. Device parameters like quantum efficiencies and threshold current densities are discussed as they pertain to this specific material system. Chapter 6 discusses inter-sub-band light emitters in this material system. Chapter 7 covers photodetectors in this material system as they cover specific frequency or wavelength ranges. Chapter 8 covers the results so far obtained in the field of photovoltaic materials in the group III-Nitride material system. Factors constraining performance and routes to future improvements are discussed. Chapter 9 covers quantum emitters using group III-Nitride materials. Chapters 10 to 12 cover some recent topics like strong-coupling polaritons, plasmonic devices and photonic integrated circuits.

Group III-Nitride optoelectronic devices have a wide range of applications like optical data storage, solid state lighting, light detection and ranging (LiDAR), and scientific metrology. As the device parameters are better understood and as device improvements take place, the range of applications expands both in terms of type and capability. The following chapters cover the most basic physics and the device aspects needed to understand current devices and potential future applications.