Micro / Nano Replication E-Book

Shinill Kang

• Herausgeber: John Wiley & Sons
• Kategorie: Fachliteratur
• Sprache: Englisch

Seitenzahl: 426

Veröffentlichungsjahr: 2012

Beschreibung

An introduction to micro and nano replication processes and applications

Micro/Nano Replication: Processes and Applications provides an overview of the fundamentals, processes, and applications involved in micro and nano replication in the manufacturing of product parts. A major field of nanotechnology, the study of micro/nano replication is sure to become one of increasing importance as the construction of completely new devices based on innovative concepts and crafted at the molecular level increases.

Designed to help the reader understand and learn to work with the growing number of tools for molding plastic components, the book covers the key topics related to replication, including patterning technology, the modification of mold surface properties, and much more. In addition, it addresses the strengths and weaknesses of different molding processes.

With a strong focus not only on how micro/nano replication works, but also the broader implications for the industry, the book is packed with examples of real world applications. These are drawn from a variety of fields, including information storage devices, optoelectronic elements, optical communication, and biosensors, in order to provide a complete view of the importance of micro and nano processes.

A valuable introduction to a new but fast-growing field, Micro/Nano Replication is an essential resource for anyone looking to get a head start on understanding this emerging discipline.

Leseprobe

Contents

Cover

Title Page

Copyright

Dedication

Preface

Chapter 1: Introduction

1.1 Introduction

1.2 Micro/Nano replication

1.3 Application Fields of Micro/Nano Replicated Parts

1.4 Required Technologies for Micro/Nano replication

References

Chapter 2: Patterning Technology for Micro/Nanomold Fabrication

2.1 Material Removal Process

2.2 Lithography Process

2.3 Electroforming Processes

References

Chapter 3: Modification of Mold Surface Properties

3.1 Introduction

3.2 Thiol-Based Self-Assembled Monolayer

3.3 Silane-Based Self-Assembled Monolayer

3.4 Dimethyldichlorosilane Self-Assembled Monolayer

References

Chapter 4: Micro/Nanoinjection Molding with an Intelligent Mold System

4.1 Introduction

4.2 Effects of the Mold Surface Temperature on Micro/Nanoinjection Molding

4.3 Theoretical Analysis of Passive/Active Heating Methods for Controlling the Mold Surface Temperature

4.4 Fabrication and Control of an Active Heating System Using an Mems Heater and an Rtd Sensor

4.5 Replication of a High-Density Optical Disc Substrate Using the Intelligent Mold System

References

Chapter 5: Hot Embossing of Microstructured Surfaces and Thermal Nanoimprinting

5.1 Introduction

5.2 Development of Microcompression Molding Process

5.3 Temperature Dependence of Anti-Adhesion Between a Mold and the Polymer in Thermal Imprinting Processes

5.4 Fabrication of a Micro-Optics Using Microcompression Molding with a Silicon Mold Insert

5.5 Fabrication of a Microlens Array Using Microcompression Molding with an Electroforming Mold Insert

5.6 Application of Microcompression Molding Process

References

Chapter 6: UV-Imprinting Process and Imprinted Micro/Nanostructures

6.1 Introduction

6.2 Photopolymerization

6.3 Design and Construction of UV-Imprinting System

6.4 UV-Transparent Mold

6.5 Effects of Processing Conditions on Replication Qualities

6.6 Controlling of Residual Layer Thickness Using Drop and Pressing Method

6.7 Elimination of Microair Bubbles

6.8 Applications

6.9 Conclusion

References

Chapter 7: High-Temperature Micro/Nano Replication Process

7.1 Fabrication of Metal Conductive Tracks Using Direct Imprinting of Metal Nanopowder

7.2 Glass Molding of Microlens Array

References

Chapter 8: Micro/Nano-Optics for Light-Emitting Diodes

8.1 Designing an Initial Lens Shape

8.2 Fabrication Results and Discussion

8.3 Conclusions

References

Chapter 9: Micro-/Nano-Optics for Optical Communications

9.1 Fiber Coupling Theory

9.2 Separated Microlens Array

9.3 Integrated Microlens Array

9.4 Conclusions

References

Chapter 10: Patterned Media

10.1 Introduction

10.2 Fabrication of a Metallic Nano Mold Using a UV-Imprinted Polymeric Master

10.3 Fabrication of Patterned Media Using the Nano replication Process

10.4 Fabrication of Patterned Media Using Injection Molding

10.5 Measurement and Analysis of Magnetic Domains of Patterned Media by Magnetic Force Microscopy

10.6 Conclusions

References

Chapter 11: Optical Disk Drive (ODD)

11.1 Introduction

11.2 Improvements in the Optical and Geometrical Properties of HD-DVD Substrates

11.3 Effects of the Insulation Layer on the Optical and Geometrical Properties of the DVD Mold

11.4 Optimized Design of the Replication Process for Optical Disk Substrates

11.5 Conclusions

References

Chapter 12: Biomedical Applications

12.1 Introduction

12.2 GMR-Based Protein Sensors

12.3 Conclusions

References

Index

Copyright © 2012 by John Wiley & Sons, Inc. All rights reserved.

Published by John Wiley & Sons, Inc., Hoboken, New Jersey. Published simultaneously in Canada.

No part of this publication may be reproduced, stored in a retrieval system, or transmitted in any form or by any means, electronic, mechanical, photocopying, recording, scanning, or otherwise, except as permitted under Section 107 or 108 of the 1976 United States Copyright Act, without either the prior written permission of the Publisher, or authorization through payment of the appropriate per-copy fee to the Copyright Clearance Center, Inc., 222 Rosewood Drive, Danvers, MA 01923, [phone], fax [phone], or on the web at www.copyright.com. Requests to the Publisher for permission should be addressed to the Permissions Department, John Wiley & Sons, Inc., 111 River Street, Hoboken, NJ 07030, [phone], fax [phone], or online at http://www.wiley.com/go/permissions.

Limit of Liability/Disclaimer of Warranty: While the publisher and author have used their best efforts in preparing this book, they make no representations or warranties with respect to the accuracy or completeness of the contents of this book and specifically disclaim any implied warranties of merchantability or fitness for a particular purpose. No warranty may be created or extended by sales representatives or written sales materials. The advice and strategies contained herein may not be suitable for your situation. You should consult with a professional where appropriate. Neither the publisher nor author shall be liable for any loss of profit or any other commercial damages, including but not limited to special, incidental, consequential, or other damages.

For general information on our other products and services or for technical support, please contact our Customer Care Department within the United States at [phone], outside the United States at [phone] or fax [phone].

Wiley also publishes its books in a variety of electronic formats. Some content that appears in print may not be available in electronic formats. For more information about Wiley products, visit our web site at www.wiley.com.

Library of Congress Cataloging-in-Publication Data:

Kang, Shinill.

Micro/nano replication: processes and applications / Shinill Kang.

p. cm.

Includes index.

ISBN 978-0-470-39213-3 (cloth)

1. Nanotechnology. 2. Manufacturing processes—Technological innovations.

3. Research, Industrial. I. Title.

T174.7.K36 2011

620′.5–dc23

2011049803

To My Family

Preface

The increasing demands for micro/nanostructures or components in the field of digital display, digital imaging, data storage, optical communication, nanoenergy, and biomedicine would merit a priority in establishing the fabrication technologies for micro/nanostructures or components.

Among the various fabrication technologies for micro/nanostructures or components, the replication or molding process is regarded as one of the most suitable candidates for mass production, which may offer high quality at reasonably low cost. For this reason, researchers in both academic community and industrial sectors are beginning to actively engage themselves in pursuit of research and development in the respective field of interest.

The field of micro/nano replication or molding has recently come into existence, and thus an introductory textbook in micro/nano replication is sorely needed. A useful and desirable textbook should provide a basic (i.e., readily accessible to newcomers) interdisciplinary overview of the replicated micro/nanostructures or components, to wit: how they are designed, how the molds and stamps are designed and fabricated, how they are replicated, how the properties are predetermined and evaluated, and what are the potential uses.

The fundamental problem for both students and researchers new to the field of micro/nano replication seems to be that micro/nanopatterning and replication are rarely introduced in undergraduate-level textbooks, consequently forcing students to turn to advanced review papers, edited collections of review papers, or more advanced and specialized textbooks to begin with a learning process. Unfortunately, this body of literature is relatively impenetrable for most of the undergraduates, new graduate students, and new researchers working in the field of micro/nano replication and molding. An introductory, comprehensive and self-contained textbook would be a welcome addition for students and researchers alike interested in their respective learning field.

This book will serve as an introductory textbook on the fundamentals of micro/nano replication or molding for micro/nanocomponents. It is based on lecture notes from an introductory micro/nanofabrication course I have been teaching at the graduate school of Yonsei University in Korea over the past years. My goal is to see the textbook widely adopted and used internationally as a primary source for an introductory senior-level undergraduate or beginning graduate course covering micro/nano replication. The reader will be able to obtain a wider scope of knowledge about micro/nanomold making processes and micro/nano replication processes and the strength and weakness of each process from the book. The extensive knowledge on the micro/nanopatterning and replication processes will allow him/her to control the project on the development of micro/nanocomponents by micro/nano replication process.

However, this book is not limited to the audience in academia only, but will also be useful for the researchers and engineers in research institutes or industries. Especially in the area of micro/nano replication technology, new applications are introduced almost every day. Researchers and engineers in research institutes or industries can acquire basic and fundamental knowledge of micro/nano replication and molding.

I would like to acknowledge the financial support from the Korea National Research Foundation through the Center for Information Storage Device (CISD, an ERC directed by professor Young-Pil Park), the Center for Nanoscale Mechatronics and Manufacturing (CNMM, a 21C Frontier Program directed by Dr. Sang-Rok Lee), Nanoreplication and Micro-optics National Research Laboratory (an NRL Program), and Senior Researcher Supporting Program. Most of the research results of this book could not have been obtained without the financial and technical supports mainly from the Korea National Research Foundation for the past 10 years.

I owe a great debt of gratitude to Professor Emeritus K. K. Wang at Connell University, who was instrumental in shaping my research goal in the field of “replication.”

I would like to express my warmest thanks to the professors of College of Engineering at Yonsei University for their friendship and encouragement throughout the journey of writing this book. I would also gratefully acknowledge the dedicated supports from the colleagues of CISD, CNMM, Nano Manufacturing Research Center (under the direction of professor Sang Jo Lee), The Korean Society for Technology of Plasticity (KSTP), the Korean Society for Precision Engineering (KSPE), The Korean Society of Manufacturing Technology Engineering (KSMTE) and the Korea–Japan Joint Polymer Processing Committee of KSTP and The Japan Society for Technology of Plasticity (JSTP).

Special thanks go to the former and present graduate students of the Nanoreplication and Micro-optics National Research Laboratory at Yonsei University for their invaluable assistance in preparing this book.

And last but not the least, I am very grateful to the publisher's staff, and especially Mr. Jonathan T. Rose, Editor, for their support, encouragement, and willingness to offer generous assistance during the entire book publishing project. As I cannot guarantee that this book is free of unintended errors, any corrections and suggestions from the readers are highly appreciated.

Shinill Kang

Chapter 1

Introduction

1.1 Introduction

Nanotechnology is receiving more attention as an innovative technology that will lead the way to the future, along with information technology (IT) and biotechnology (BT) [1, 2]. Nanotechnology permits the structure, shape, and other characteristics of a material to be controlled on a nanometer scale (10–9: 1/1,000,000,000 m). Since the size of an atom or a molecule is generally on the order of 1/10 of a nanometer, nanotechnology actually provides control of the structure of a material at the atomic or molecular level (i.e., a minimal quantity of the material). While existing microtechnology is limited to product miniaturization [3–9], nanotechnology enables not only the miniaturization of components but also the creation of completely new devices based on innovative concepts since materials can be freely manipulated at the molecular level. Accordingly, nanotechnology is expected to usher in innovative changes in all industrial areas, including electronics [10–12], biology [13–15], chemistry [16, 17], and energy-related fields [18, 19]. Nanotechnology is regarded as being in the embryonic stage, intermediate between science and technology. However, considering the current speed of technological development and the widespread ripple effects across related industries, there is no question that a substantial market for nanotechnology will eventually be created. The National Science Foundation (NSF) of the United States predicts that the size of the nanotechnology market will exceed US$ 1 trillion in 10–15 years [20]. A market worth US$ 300 billion or more will be created in both the materials and the semiconductor industries, and active practical use of nanotechnology is expected in a variety of industries, including medicine, chemistry, energy, transportation, environmental science, and agriculture. For example, in the electronics industry, it is expected that new components will be developed, surpassing the limits of existing electronic devices with respect to miniaturization, speed, and power consumption. The Hitachi Research Institute in Japan anticipates that the development of nanotechnology will enable the commercialization of next-generation semiconductors, in which the processing rate will be increased by a factor of 100 while power consumption is reduced by a factor of 50, together with terabyte data storage technology, in which the storage capacity will be increased by a factor of 50. Present nanotechnology market predictions pertain only to the early nanotechnology market. It is difficult to predict how nanotechnology will evolve, and what ripple effects it will create. However, considering its innovative characteristics, it is clear that nanotechnology has a tremendous capacity to create sweeping changes in the present technology paradigm.

The potential of nanotechnology has been foreseen for a long time. In 1959, the prominent American physicist Richard Feynman predicted the possibility of manipulating materials at the atomic level [21]. He anticipated that new material properties, which could not be achieved at that time, would be realized if materials could be manipulated at the atomic and molecular levels. So why has nanotechnology (which is capable of creating such an enormous ripple effect) only so recently emerged into the spotlight? The answer is, experimental results to support the theories and the development of fundamental technologies, such as the fabrication, observation, and measurement of nanoscale features, were first necessary. Furthermore, inexpensive technologies for fabricating nanostructures, which are essential to the commercialization of nanotechnology, have only recently been developed, based on existing macro- and microfabrication technologies. Among the various types of nanostructure fabrication technologies, replication-based techniques are widely used in the mass production of nanostructures due to their high repeatability, high reliability, and low cost. A replication process that can be applied to nanostructures has recently been developed, and is expected to facilitate the practical use of nanotechnology products.